Samsung Electronics Co Ltd and Semes Co Ltd Seek Patent for Substrate Processing Apparatus and Method Thereof

Press/Media

Period	3 May 2023

Media coverage

Title	Samsung Electronics Co Ltd and Semes Co Ltd Seek Patent for Substrate Processing Apparatus and Method Thereof
Media name/outlet	Global IP News. Semiconductor Patent News
Country/Territory	India
Date	3/05/23
URL	metabase.moreover.com/noarticleurl?type=psh&lni=685P-KHP1-DY0W-440G-00000-00
Persons	Min-Sik Park