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Dive into the research topics where Kyu Chang Park is active. These topic labels come from the works of this person. Together they form a unique fingerprint.
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Carbon Nanotube-Based Cold Electron Beam (C-Beam) EUV Source for CNT Membrane Inspection
Apugade, U. B., Kim, I. & Park, K. C., 2026, In: IEEE Transactions on Electron Devices. 73, 2, p. 1008-1014 7 p.Research output: Contribution to journal › Article › peer-review
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Optimization and performance enhancement of single island carbon nanotube electron beams for microscopy application
Patil, R., Karande, A. & Park, K. C., 1 Jan 2026, In: Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics. 44, 1, 013203.Research output: Contribution to journal › Article › peer-review
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Focusing electrode effect on the EUV lighting technology based on C-beam irradiation technique
Kim, I., Apugade, U. B., Oh, S. M. & Park, K. C., 1 Mar 2025, In: Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics. 43, 2, 022211.Research output: Contribution to journal › Article › peer-review
1 Citation (Scopus) -
Impact of Beam Collimation on EUV Light Emission in C-beam-Based EUV Systems
Apugade, U. B., Kim, I. & Park, K. C., 2025, 2025 38th International Vacuum Nanoelectronics Conference, IVNC 2025. Institute of Electrical and Electronics Engineers Inc., (2025 38th International Vacuum Nanoelectronics Conference, IVNC 2025).Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review
1 Citation (Scopus) -
Physical Interpretation of Field Emission Behavior in Patterned Samples via Simulation-Validated Models
Lee, J., Choi, H. E., Kim, M., Bhotkar, K., Park, K. C., Jeon, S. & Choi, E., 2025, In: IEEE Transactions on Electron Devices. 72, 12, p. 7060-7065 6 p.Research output: Contribution to journal › Article › peer-review