Abstract
This work proposes a 3D lithography technique with self-focusing during polymerization based on refractive-indices change of polyethylene glycol diacrylate (PEGDA) (Fig. 1). Compared to the previous work, the present work enables to fabricate 3D structures using single UV exposure and theoretically estimate 3D features. We demonstrate the potential of the self-focusing 3D lithography by fabricating PEGDA microneedles and trapezoid-shaped wells. Their structures well match to our theoretical estimation. Therefore, our theoretical approach shows its potential for on-demand, complicated 3D structures of refractive-indices-variable materials with single UV exposure.
| Original language | English |
|---|---|
| Title of host publication | 33rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2020 |
| Publisher | Institute of Electrical and Electronics Engineers Inc. |
| Pages | 323-324 |
| Number of pages | 2 |
| ISBN (Electronic) | 9781728135809 |
| DOIs | |
| Publication status | Published - Jan 2020 |
| Event | 33rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2020 - Vancouver, Canada Duration: 18 Jan 2020 → 22 Jan 2020 |
Publication series
| Name | Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS) |
|---|---|
| Volume | 2020-January |
| ISSN (Print) | 1084-6999 |
Conference
| Conference | 33rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2020 |
|---|---|
| Country/Territory | Canada |
| City | Vancouver |
| Period | 18/01/20 → 22/01/20 |
Bibliographical note
Publisher Copyright:© 2020 IEEE.
Keywords
- 3D lithography
- Microneedle
- PEGDA
- Self-focusing
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