TY - GEN
T1 - 3D laser lithography combined with Parylene coating for the rapid fabrication of 3D microstructures
AU - Kurihara, M.
AU - Heo, Y. J.
AU - Kuribayashi-Shigetomi, K.
AU - Takeuchi, S.
N1 - Copyright:
Copyright 2012 Elsevier B.V., All rights reserved.
PY - 2012
Y1 - 2012
N2 - This paper describes a simple and rapid process for the fabrication of 3D solid microstructures. We combined a conventional two-photon direct laser writing with a Parylene coating process. Two-photon direct laser writing allows us to make arbitrary 3D nano / micro structures, but it takes a long time to draw a 3D solid structure because the laser scans inside of photo-sensitive materials. Here, we deposited Parylene on the wire frame structure to fill the gap between the wires. This process allows us to rapidly form a solid surface on the wire frame structures. Our method can fabricate a cube of 100 μm x 100 μm x 40 μm 20 times faster compared to the conventional two-photon direct laser writing.
AB - This paper describes a simple and rapid process for the fabrication of 3D solid microstructures. We combined a conventional two-photon direct laser writing with a Parylene coating process. Two-photon direct laser writing allows us to make arbitrary 3D nano / micro structures, but it takes a long time to draw a 3D solid structure because the laser scans inside of photo-sensitive materials. Here, we deposited Parylene on the wire frame structure to fill the gap between the wires. This process allows us to rapidly form a solid surface on the wire frame structures. Our method can fabricate a cube of 100 μm x 100 μm x 40 μm 20 times faster compared to the conventional two-photon direct laser writing.
UR - http://www.scopus.com/inward/record.url?scp=84860460161&partnerID=8YFLogxK
U2 - 10.1109/MEMSYS.2012.6170124
DO - 10.1109/MEMSYS.2012.6170124
M3 - Conference contribution
AN - SCOPUS:84860460161
SN - 9781467303248
T3 - Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
SP - 196
EP - 199
BT - 2012 IEEE 25th International Conference on Micro Electro Mechanical Systems, MEMS 2012
T2 - 2012 IEEE 25th International Conference on Micro Electro Mechanical Systems, MEMS 2012
Y2 - 29 January 2012 through 2 February 2012
ER -