3D laser lithography combined with Parylene coating for the rapid fabrication of 3D microstructures

M. Kurihara, Y. J. Heo, K. Kuribayashi-Shigetomi, S. Takeuchi

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

9 Citations (Scopus)

Abstract

This paper describes a simple and rapid process for the fabrication of 3D solid microstructures. We combined a conventional two-photon direct laser writing with a Parylene coating process. Two-photon direct laser writing allows us to make arbitrary 3D nano / micro structures, but it takes a long time to draw a 3D solid structure because the laser scans inside of photo-sensitive materials. Here, we deposited Parylene on the wire frame structure to fill the gap between the wires. This process allows us to rapidly form a solid surface on the wire frame structures. Our method can fabricate a cube of 100 μm x 100 μm x 40 μm 20 times faster compared to the conventional two-photon direct laser writing.

Original languageEnglish
Title of host publication2012 IEEE 25th International Conference on Micro Electro Mechanical Systems, MEMS 2012
Pages196-199
Number of pages4
DOIs
Publication statusPublished - 2012
Event2012 IEEE 25th International Conference on Micro Electro Mechanical Systems, MEMS 2012 - Paris, France
Duration: 29 Jan 20122 Feb 2012

Publication series

NameProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
ISSN (Print)1084-6999

Conference

Conference2012 IEEE 25th International Conference on Micro Electro Mechanical Systems, MEMS 2012
Country/TerritoryFrance
CityParis
Period29/01/122/02/12

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