TY - GEN
T1 - A fabrication technique of three-dimensional nanochannel bridges without nanolithography
AU - Heo, Yun Jung
AU - Sato, Koji
AU - Takeuchi, Shoji
N1 - Copyright:
Copyright 2014 Elsevier B.V., All rights reserved.
PY - 2012
Y1 - 2012
N2 - We present a simple, flexible fabrication technique to develop three-dimensional nanochannel arrays that can be embedded in a micro/nano-fluidic system using direct laser writing. We easily obtained a nanochannel bridge between two microfluidic channels on a glass slide by laser-scanning photosensitive materials filled in microchannels. We also fabricated a vertical nanochannel array, thus showing the feasibility of three-dimensional nanochannel fabrication. We envision that the nanochannel array fabrication technique will facilitate to increase the functionality of microfluidic systems.
AB - We present a simple, flexible fabrication technique to develop three-dimensional nanochannel arrays that can be embedded in a micro/nano-fluidic system using direct laser writing. We easily obtained a nanochannel bridge between two microfluidic channels on a glass slide by laser-scanning photosensitive materials filled in microchannels. We also fabricated a vertical nanochannel array, thus showing the feasibility of three-dimensional nanochannel fabrication. We envision that the nanochannel array fabrication technique will facilitate to increase the functionality of microfluidic systems.
KW - Direct laser writing
KW - Nano-bridge
KW - Nanochannel fabrication
KW - Nanofluidic system
KW - Vertical nanochannel array
UR - http://www.scopus.com/inward/record.url?scp=84901788984&partnerID=8YFLogxK
M3 - Conference contribution
AN - SCOPUS:84901788984
SN - 9780979806452
T3 - Proceedings of the 16th International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2012
SP - 1819
EP - 1821
BT - Proceedings of the 16th International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2012
PB - Chemical and Biological Microsystems Society
T2 - 16th International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2012
Y2 - 28 October 2012 through 1 November 2012
ER -