A nanochannel fabrication technique by two-photon direct laser writing

Y. J. Heo; S. Iwanaga; S. Takeuchi

doi:10.1109/MEMSYS.2012.6170182

A nanochannel fabrication technique by two-photon direct laser writing

Y. J. Heo, S. Iwanaga, S. Takeuchi

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

2 Citations (Scopus)

Abstract

We present a simple, fast nanochannel fabrication technique to develop hundred nanometer sized channels based on two-photon direct laser writing. By controlling laser power and location of a focused beam, we fabricated nanolines having minimum width of 180 nm. We also obtained nanochannels in the area of 110 μm x 25 μm by laser-writing with process time of 1 hour and verified rhodamine solution flowed into the nanochannels of 400 nm in width. Furthermore, this process can add desired nanochannels inside of pre-existing microfluidic systems. Therefore, we envision that the proposed nanochannel fabrication technique will facilitate technologies to detect DNA, proteins and chemicals in microfluidic systems.

Original language	English
Title of host publication	2012 IEEE 25th International Conference on Micro Electro Mechanical Systems, MEMS 2012
Pages	997-1000
Number of pages	4
DOIs	https://doi.org/10.1109/MEMSYS.2012.6170182
Publication status	Published - 2012
Event	2012 IEEE 25th International Conference on Micro Electro Mechanical Systems, MEMS 2012 - Paris, France Duration: 29 Jan 2012 → 2 Feb 2012

Publication series

Name	Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
ISSN (Print)	1084-6999

Conference

Conference	2012 IEEE 25th International Conference on Micro Electro Mechanical Systems, MEMS 2012
Country/Territory	France
City	Paris
Period	29/01/12 → 2/02/12

Access to Document

10.1109/MEMSYS.2012.6170182

Cite this

Heo, Y. J., Iwanaga, S., & Takeuchi, S. (2012). A nanochannel fabrication technique by two-photon direct laser writing. In 2012 IEEE 25th International Conference on Micro Electro Mechanical Systems, MEMS 2012 (pp. 997-1000). Article 6170182 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). https://doi.org/10.1109/MEMSYS.2012.6170182

@inproceedings{f03ad07f765a456ba7108be328f21c16,

title = "A nanochannel fabrication technique by two-photon direct laser writing",

abstract = "We present a simple, fast nanochannel fabrication technique to develop hundred nanometer sized channels based on two-photon direct laser writing. By controlling laser power and location of a focused beam, we fabricated nanolines having minimum width of 180 nm. We also obtained nanochannels in the area of 110 μm x 25 μm by laser-writing with process time of 1 hour and verified rhodamine solution flowed into the nanochannels of 400 nm in width. Furthermore, this process can add desired nanochannels inside of pre-existing microfluidic systems. Therefore, we envision that the proposed nanochannel fabrication technique will facilitate technologies to detect DNA, proteins and chemicals in microfluidic systems.",

author = "Heo, {Y. J.} and S. Iwanaga and S. Takeuchi",

note = "Copyright: Copyright 2012 Elsevier B.V., All rights reserved.; 2012 IEEE 25th International Conference on Micro Electro Mechanical Systems, MEMS 2012 ; Conference date: 29-01-2012 Through 02-02-2012",

year = "2012",

doi = "10.1109/MEMSYS.2012.6170182",

language = "English",

isbn = "9781467303248",

series = "Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)",

pages = "997--1000",

booktitle = "2012 IEEE 25th International Conference on Micro Electro Mechanical Systems, MEMS 2012",

}

Heo, YJ, Iwanaga, S & Takeuchi, S 2012, A nanochannel fabrication technique by two-photon direct laser writing. in 2012 IEEE 25th International Conference on Micro Electro Mechanical Systems, MEMS 2012., 6170182, Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), pp. 997-1000, 2012 IEEE 25th International Conference on Micro Electro Mechanical Systems, MEMS 2012, Paris, France, 29/01/12. https://doi.org/10.1109/MEMSYS.2012.6170182

A nanochannel fabrication technique by two-photon direct laser writing. / Heo, Y. J.; Iwanaga, S.; Takeuchi, S.
2012 IEEE 25th International Conference on Micro Electro Mechanical Systems, MEMS 2012. 2012. p. 997-1000 6170182 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - A nanochannel fabrication technique by two-photon direct laser writing

AU - Heo, Y. J.

AU - Iwanaga, S.

AU - Takeuchi, S.

PY - 2012

Y1 - 2012

N2 - We present a simple, fast nanochannel fabrication technique to develop hundred nanometer sized channels based on two-photon direct laser writing. By controlling laser power and location of a focused beam, we fabricated nanolines having minimum width of 180 nm. We also obtained nanochannels in the area of 110 μm x 25 μm by laser-writing with process time of 1 hour and verified rhodamine solution flowed into the nanochannels of 400 nm in width. Furthermore, this process can add desired nanochannels inside of pre-existing microfluidic systems. Therefore, we envision that the proposed nanochannel fabrication technique will facilitate technologies to detect DNA, proteins and chemicals in microfluidic systems.

AB - We present a simple, fast nanochannel fabrication technique to develop hundred nanometer sized channels based on two-photon direct laser writing. By controlling laser power and location of a focused beam, we fabricated nanolines having minimum width of 180 nm. We also obtained nanochannels in the area of 110 μm x 25 μm by laser-writing with process time of 1 hour and verified rhodamine solution flowed into the nanochannels of 400 nm in width. Furthermore, this process can add desired nanochannels inside of pre-existing microfluidic systems. Therefore, we envision that the proposed nanochannel fabrication technique will facilitate technologies to detect DNA, proteins and chemicals in microfluidic systems.

UR - http://www.scopus.com/inward/record.url?scp=84860440172&partnerID=8YFLogxK

U2 - 10.1109/MEMSYS.2012.6170182

DO - 10.1109/MEMSYS.2012.6170182

M3 - Conference contribution

AN - SCOPUS:84860440172

SN - 9781467303248

T3 - Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

SP - 997

EP - 1000

BT - 2012 IEEE 25th International Conference on Micro Electro Mechanical Systems, MEMS 2012

T2 - 2012 IEEE 25th International Conference on Micro Electro Mechanical Systems, MEMS 2012

Y2 - 29 January 2012 through 2 February 2012

ER -

A nanochannel fabrication technique by two-photon direct laser writing

Abstract

Publication series

Conference

Access to Document

Other files and links

Fingerprint

Cite this