Advancing Debris-free EUV Light Source Technology with Reduced Visible Light Effect by Cold Cathode Electron Beam (C-Beam) Irradiation

Umesh Balaso Apugade, Bishwa Chandra Adhikari, Iksu Kim, Kyu Chang Park

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

1 Citation (Scopus)

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Earth and Planetary Sciences

Engineering