Analysis of interface layers by spectroscopic ellipsometry

T. J. Kim; J. J. Yoon; Y. D. Kim; D. E. Aspnes; M. V. Klein; D. S. Ko; Y. W. Kim; V. C. Elarde; J. J. Coleman

doi:10.1016/j.apsusc.2008.07.005

Analysis of interface layers by spectroscopic ellipsometry

T. J. Kim
, J. J. Yoon
, Y. D. Kim
, D. E. Aspnes
, M. V. Klein
, D. S. Ko
, Y. W. Kim
, V. C. Elarde
, J. J. Coleman

Research output: Contribution to journal › Article › peer-review

1 Citation (Scopus)

Abstract

We investigate the relative validity of the Bruggeman effective-medium approximation and several alloy models to describe interfaces in the analysis of spectroscopic ellipsometric data of laminar samples, using data obtained on an Al_xGa_1-xAs multilayer sample fabricated specifically for this purpose. The investigation highlights the types of errors that result from the use of inappropriate models. Optimum results are obtained with the alloy model where the graded-composition regions are approximated with multilayer stacks.

Original language	English
Pages (from-to)	640-642
Number of pages	3
Journal	Applied Surface Science
Volume	255
Issue number	3
DOIs	https://doi.org/10.1016/j.apsusc.2008.07.005
Publication status	Published - 30 Nov 2008

Bibliographical note

Funding Information:
This work was supported by a Korea Research Foundation Grant (KRF-2005-015-C00144). The work at North Carolina State University was supported by the Office of Naval Research. The authors thank Ms. R. Rangarajan for the growth of the samples.

Keywords

AlGaAs
Ellipsometry
Multilayer

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10.1016/j.apsusc.2008.07.005

Cite this

@article{c93daad83db241f1a25ff500e1526a0b,

title = "Analysis of interface layers by spectroscopic ellipsometry",

abstract = "We investigate the relative validity of the Bruggeman effective-medium approximation and several alloy models to describe interfaces in the analysis of spectroscopic ellipsometric data of laminar samples, using data obtained on an AlxGa1-xAs multilayer sample fabricated specifically for this purpose. The investigation highlights the types of errors that result from the use of inappropriate models. Optimum results are obtained with the alloy model where the graded-composition regions are approximated with multilayer stacks.",

keywords = "AlGaAs, Ellipsometry, Multilayer",

author = "Kim, \{T. J.\} and Yoon, \{J. J.\} and Kim, \{Y. D.\} and Aspnes, \{D. E.\} and Klein, \{M. V.\} and Ko, \{D. S.\} and Kim, \{Y. W.\} and Elarde, \{V. C.\} and Coleman, \{J. J.\}",

note = "Funding Information: This work was supported by a Korea Research Foundation Grant (KRF-2005-015-C00144). The work at North Carolina State University was supported by the Office of Naval Research. The authors thank Ms. R. Rangarajan for the growth of the samples. ",

year = "2008",

month = nov,

day = "30",

doi = "10.1016/j.apsusc.2008.07.005",

language = "English",

volume = "255",

pages = "640--642",

journal = "Applied Surface Science",

issn = "0169-4332",

publisher = "Elsevier BV",

number = "3",

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TY - JOUR

T1 - Analysis of interface layers by spectroscopic ellipsometry

AU - Kim, T. J.

AU - Yoon, J. J.

AU - Kim, Y. D.

AU - Aspnes, D. E.

AU - Klein, M. V.

AU - Ko, D. S.

AU - Kim, Y. W.

AU - Elarde, V. C.

AU - Coleman, J. J.

N1 - Funding Information: This work was supported by a Korea Research Foundation Grant (KRF-2005-015-C00144). The work at North Carolina State University was supported by the Office of Naval Research. The authors thank Ms. R. Rangarajan for the growth of the samples.

PY - 2008/11/30

Y1 - 2008/11/30

N2 - We investigate the relative validity of the Bruggeman effective-medium approximation and several alloy models to describe interfaces in the analysis of spectroscopic ellipsometric data of laminar samples, using data obtained on an AlxGa1-xAs multilayer sample fabricated specifically for this purpose. The investigation highlights the types of errors that result from the use of inappropriate models. Optimum results are obtained with the alloy model where the graded-composition regions are approximated with multilayer stacks.

AB - We investigate the relative validity of the Bruggeman effective-medium approximation and several alloy models to describe interfaces in the analysis of spectroscopic ellipsometric data of laminar samples, using data obtained on an AlxGa1-xAs multilayer sample fabricated specifically for this purpose. The investigation highlights the types of errors that result from the use of inappropriate models. Optimum results are obtained with the alloy model where the graded-composition regions are approximated with multilayer stacks.

KW - AlGaAs

KW - Ellipsometry

KW - Multilayer

UR - https://www.scopus.com/pages/publications/55849105933

U2 - 10.1016/j.apsusc.2008.07.005

DO - 10.1016/j.apsusc.2008.07.005

M3 - Article

AN - SCOPUS:55849105933

SN - 0169-4332

VL - 255

SP - 640

EP - 642

JO - Applied Surface Science

JF - Applied Surface Science

IS - 3

ER -

Analysis of interface layers by spectroscopic ellipsometry

Abstract

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Keywords

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