Anomalous light-induced enhancement of photoluminescence from Si nanocrystals fabricated by thermal oxidation of amorphous Si

Min Choul Kim, Sung Kim, Suk Ho Choi, Sangjin Park

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8 Citations (Scopus)

Abstract

A band of ∼1.6 nm diameter Si nanocrystals (NCs) has been prepared at a depth of about 5 nm within Si O2 by atomic-layer deposition of 2 nm amorphous Si on 5 nm Si O2 and subsequent thermal oxidation at 900 °C. After 4 h light exposure of 5.66 W cm2, photoluminescence (PL) spectrum of the Si NCs is almost 60 times enhanced with its peak blueshifted by about 30 nm. The enhancement rate of the PL intensity with illumination time increases as the oxidation time increases. The PL intensity and its peak wavelength are partially recovered by annealing the samples at 440 K for 1 h, suggesting the effect is metastable. It is proposed that the anomalous light-induced effect is originated from the defect states at the Si NCsSi O2 interfaces.

Original languageEnglish
Article number033111
JournalApplied Physics Letters
Volume91
Issue number3
DOIs
Publication statusPublished - 2007

Bibliographical note

Funding Information:
This work was supported by the National Research Program for the 0.1 Terabit Non-Volatile Memory Development sponsored by the Korean Ministry of Science and Technology. HRTEM and SRPES measurements were performed using the high-voltage electron microscope (JEM-ARM1300S, Jeol, Japan) installed at Korea Basic Science Institute and the 7B1 beamline of Pohang Accelerator Laboratory at Pohang, Korea, respectively.

Copyright:
Copyright 2008 Elsevier B.V., All rights reserved.

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