Asymmetric glancing angle co-sputtering method for the nanostructural and compositional engineering of nanocomposite anodes for thin-film solid oxide fuel cells

In this study, Nickel-yttrium-doped ceria (Ni-YDC) nanocomposite anodes with a wide range of Ni compositions and nanostructures are fabricated using a novel asymmetric glancing angle co-sputtering method. This approach combines glancing-angle deposition (GLAD) and co-sputtering to achieve precise control over anode composition and nanostructure, a level of control that is challenging with conventional physical vapor deposition methods. The high incident angle (75°) of Ni particles allows for fine adjustment of Ni content, resulting in increased nanocolumn density and porosity due to the enhanced shadowing effect. Electrochemical evaluations and short-term stability tests indicate that the optimized Ni–YDC composition performs exceptionally well in anodized aluminum oxide (AAO)-supported thin-film solid oxide fuel cells (TF-SOFCs), achieving a peak power density (PPD) of 661.6 mW cm⁻² at 500 °C, the highest reported for YSZ-based TF-SOFCs to date. This method demonstrates the potential for manufacturing other TF-SOFC components, offering a promising route toward scalable, high-performance TF-SOFC production.