Abstract
GaN and InGaN single-layer and InGaN/GaN multi-quantum-well (MQW) structures were grown in sequence on sapphire (0001) substrates by using metalorganic chemical vapor deposition, and the luminescence characteristics of each layer were investigated employing room-temperature cathodoluminescence (CL). Large-scale In-rich grains several microns in width were observed in the monochromatic CL image, presumably formed at the InGaN MQW layer. The CL spectra measured at In-rich grains showed a slight red-shift and an enhanced peak intensity. The effect of low-energy electron-beam irradiation on the luminescence characteristics of each layer was investigated, and a monotonic decrease of the peak intensity was observed as a function of the irradiation dose. The reduction ratio of the normalized integrated intensity due to irradiation damage was found to be lower in In-rich InGaN than in GaN.
Original language | English |
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Pages (from-to) | 846-849 |
Number of pages | 4 |
Journal | Journal of the Korean Physical Society |
Volume | 37 |
Issue number | 6 |
DOIs | |
Publication status | Published - Dec 2000 |