Cathodoluminescence from electron beam crystallized silicon thin film

Seon Yong Park; Jung Su Kang; Ha Rim Lee; Su Woong Lee; Kyu Chang Park

Cathodoluminescence from electron beam crystallized silicon thin film

Seon Yong Park, Jung Su Kang, Ha Rim Lee, Su Woong Lee, Kyu Chang Park

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

Abstract

Cathodoluminescence (CL) were observed from silicon thin films exposed by electron beam (E-beam). The CL of the silicon film has a spectra at the range of 300-800 nm. This spectra is different from a silicon thin film which was not exposed by E-beam. This phenomenon will be presented.

Original language	English
Title of host publication	20th International Display Workshops 2013, IDW 2013
Publisher	International Display Workshops
Pages	1366-1369
Number of pages	4
ISBN (Electronic)	9781510827783
Publication status	Published - 2013
Event	20th International Display Workshops 2013, IDW 2013 - Sapporo, Japan Duration: 3 Dec 2013 → 6 Dec 2013

Publication series

Name	Proceedings of the International Display Workshops
Volume	2
ISSN (Print)	1883-2490

Conference

Conference	20th International Display Workshops 2013, IDW 2013
Country/Territory	Japan
City	Sapporo
Period	3/12/13 → 6/12/13

Bibliographical note

Publisher Copyright:
© 2013 ITE and SID.

Keywords

Cathodoluminescence
Crystallization
Electron beam
Silicon thin film

UN SDGs

This output contributes to the following UN Sustainable Development Goals (SDGs)

Cite this

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title = "Cathodoluminescence from electron beam crystallized silicon thin film",

abstract = "Cathodoluminescence (CL) were observed from silicon thin films exposed by electron beam (E-beam). The CL of the silicon film has a spectra at the range of 300-800 nm. This spectra is different from a silicon thin film which was not exposed by E-beam. This phenomenon will be presented.",

keywords = "Cathodoluminescence, Crystallization, Electron beam, Silicon thin film",

author = "Park, {Seon Yong} and Kang, {Jung Su} and Lee, {Ha Rim} and Lee, {Su Woong} and Park, {Kyu Chang}",

note = "Publisher Copyright: {\textcopyright} 2013 ITE and SID.; 20th International Display Workshops 2013, IDW 2013 ; Conference date: 03-12-2013 Through 06-12-2013",

year = "2013",

language = "English",

series = "Proceedings of the International Display Workshops",

publisher = "International Display Workshops",

pages = "1366--1369",

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Cathodoluminescence from electron beam crystallized silicon thin film. / Park, Seon Yong; Kang, Jung Su; Lee, Ha Rim et al.
20th International Display Workshops 2013, IDW 2013. International Display Workshops, 2013. p. 1366-1369 (Proceedings of the International Display Workshops; Vol. 2).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - Cathodoluminescence from electron beam crystallized silicon thin film

AU - Park, Seon Yong

AU - Kang, Jung Su

AU - Lee, Ha Rim

AU - Lee, Su Woong

AU - Park, Kyu Chang

PY - 2013

Y1 - 2013

N2 - Cathodoluminescence (CL) were observed from silicon thin films exposed by electron beam (E-beam). The CL of the silicon film has a spectra at the range of 300-800 nm. This spectra is different from a silicon thin film which was not exposed by E-beam. This phenomenon will be presented.

AB - Cathodoluminescence (CL) were observed from silicon thin films exposed by electron beam (E-beam). The CL of the silicon film has a spectra at the range of 300-800 nm. This spectra is different from a silicon thin film which was not exposed by E-beam. This phenomenon will be presented.

KW - Cathodoluminescence

KW - Crystallization

KW - Electron beam

KW - Silicon thin film

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M3 - Conference contribution

AN - SCOPUS:85026255880

T3 - Proceedings of the International Display Workshops

SP - 1366

EP - 1369

BT - 20th International Display Workshops 2013, IDW 2013

PB - International Display Workshops

T2 - 20th International Display Workshops 2013, IDW 2013

Y2 - 3 December 2013 through 6 December 2013

ER -

Cathodoluminescence from electron beam crystallized silicon thin film

Abstract

Publication series

Conference

Bibliographical note

Keywords

UN SDGs

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Cite this