Abstract
Cathodoluminescence (CL) were observed from silicon thin films exposed by electron beam (E-beam). The CL of the silicon film has a spectra at the range of 300-800 nm. This spectra is different from a silicon thin film which was not exposed by E-beam. This phenomenon will be presented.
| Original language | English |
|---|---|
| Title of host publication | 20th International Display Workshops 2013, IDW 2013 |
| Publisher | International Display Workshops |
| Pages | 1366-1369 |
| Number of pages | 4 |
| ISBN (Electronic) | 9781510827783 |
| Publication status | Published - 2013 |
| Event | 20th International Display Workshops 2013, IDW 2013 - Sapporo, Japan Duration: 3 Dec 2013 → 6 Dec 2013 |
Publication series
| Name | Proceedings of the International Display Workshops |
|---|---|
| Volume | 2 |
| ISSN (Print) | 1883-2490 |
Conference
| Conference | 20th International Display Workshops 2013, IDW 2013 |
|---|---|
| Country/Territory | Japan |
| City | Sapporo |
| Period | 3/12/13 → 6/12/13 |
Bibliographical note
Publisher Copyright:© 2013 ITE and SID.
UN SDGs
This output contributes to the following UN Sustainable Development Goals (SDGs)
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SDG 3 Good Health and Well-being
Keywords
- Cathodoluminescence
- Crystallization
- Electron beam
- Silicon thin film
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