Cathodoluminescence properties of silicon thin films with carbon nanotube electron beam (C-beam) exposure technique

Won Jong Kim, Jung Su Kang, Ha Rim Lee, Ji Hwan Hong, Hee Tae Park, Kyu Chang Park

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

In this study, we investigated the cathodoluminescence (CL) properties of silicon thin films with carbon nanotube electron beam (C-beam) exposure technique. An intensive CL emission spectrum is observed in the visible range of 300-800 nm and also we compared the CL properties with varying the thickness of silicon thin films.

Original languageEnglish
Title of host publication21st International Display Workshops 2014, IDW 2014
PublisherSociety for Information Display
Pages1239-1242
Number of pages4
ISBN (Electronic)9781510827790
Publication statusPublished - 2014
Event21st International Display Workshops 2014, IDW 2014 - Niigata, Japan
Duration: 3 Dec 20145 Dec 2014

Publication series

Name21st International Display Workshops 2014, IDW 2014
Volume2

Conference

Conference21st International Display Workshops 2014, IDW 2014
Country/TerritoryJapan
CityNiigata
Period3/12/145/12/14

Bibliographical note

Publisher Copyright:
© 2014 . Society for Information Display. All rights reserved.

Keywords

  • C-beam
  • CL
  • CNT emitters
  • Field emission

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