Comparison of corning silicon-on-glass technology and ELA poly-si TFT uniformity performance

J. Gregory Couillard; Carlo Kosik Williams; Chuan Che Wang; Eric Mozdy; Jeffrey Cites; Jae Won Choi; Seung Hyun Park; Saurabh Saxena; Yong Duck Son; Jun Hyuk Cheon; Jae Ik Kim; Jin Jang; Jackson Lai; Jeff Hsin Chang; Gregory Heiler; Timothy J. Tredwell

Comparison of corning silicon-on-glass technology and ELA poly-si TFT uniformity performance

J. Gregory Couillard, Carlo Kosik Williams, Chuan Che Wang, Eric Mozdy, Jeffrey Cites, Jae Won Choi, Seung Hyun Park, Saurabh Saxena, Yong Duck Son, Jun Hyuk Cheon, Jae Ik Kim, Jin Jang, Jackson Lai, Jeff Hsin Chang, Gregory Heiler, Timothy J. Tredwell

Research output: Contribution to conference › Paper › peer-review

Abstract

The performance uniformity of TFTs fabricated in single-crystal Silicon-on-Glass (SiOG) and ELA poly-Si substrates was investigated. The SiOG devices exhibited better electrical performance with greater uniformity in mobility, threshold voltage, and subthreshold swing. This illustrates potential advantages for SiOG in display manufacturing.

Original language	English
Pages	261-264
Number of pages	4
Publication status	Published - 2009
Event	16th International Display Workshops, IDW '09 - Miyazaki, Japan Duration: 9 Dec 2009 → 11 Dec 2009

Conference

Conference	16th International Display Workshops, IDW '09
Country/Territory	Japan
City	Miyazaki
Period	9/12/09 → 11/12/09

Cite this

Couillard, J. G., Williams, C. K., Wang, C. C., Mozdy, E., Cites, J., Choi, J. W., Park, S. H., Saxena, S., Son, Y. D., Cheon, J. H., Kim, J. I., Jang, J., Lai, J., Chang, J. H., Heiler, G., & Tredwell, T. J. (2009). Comparison of corning silicon-on-glass technology and ELA poly-si TFT uniformity performance. 261-264. Paper presented at 16th International Display Workshops, IDW '09, Miyazaki, Japan.

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title = "Comparison of corning silicon-on-glass technology and ELA poly-si TFT uniformity performance",

abstract = "The performance uniformity of TFTs fabricated in single-crystal Silicon-on-Glass (SiOG) and ELA poly-Si substrates was investigated. The SiOG devices exhibited better electrical performance with greater uniformity in mobility, threshold voltage, and subthreshold swing. This illustrates potential advantages for SiOG in display manufacturing.",

author = "Couillard, {J. Gregory} and Williams, {Carlo Kosik} and Wang, {Chuan Che} and Eric Mozdy and Jeffrey Cites and Choi, {Jae Won} and Park, {Seung Hyun} and Saurabh Saxena and Son, {Yong Duck} and Cheon, {Jun Hyuk} and Kim, {Jae Ik} and Jin Jang and Jackson Lai and Chang, {Jeff Hsin} and Gregory Heiler and Tredwell, {Timothy J.}",

year = "2009",

language = "English",

pages = "261--264",

note = "16th International Display Workshops, IDW '09 ; Conference date: 09-12-2009 Through 11-12-2009",

}

Couillard, JG, Williams, CK, Wang, CC, Mozdy, E, Cites, J, Choi, JW, Park, SH, Saxena, S, Son, YD, Cheon, JH, Kim, JI, Jang, J, Lai, J, Chang, JH, Heiler, G & Tredwell, TJ 2009, 'Comparison of corning silicon-on-glass technology and ELA poly-si TFT uniformity performance', Paper presented at 16th International Display Workshops, IDW '09, Miyazaki, Japan, 9/12/09 - 11/12/09 pp. 261-264.

TY - CONF

T1 - Comparison of corning silicon-on-glass technology and ELA poly-si TFT uniformity performance

AU - Couillard, J. Gregory

AU - Williams, Carlo Kosik

AU - Wang, Chuan Che

AU - Mozdy, Eric

AU - Cites, Jeffrey

AU - Choi, Jae Won

AU - Park, Seung Hyun

AU - Saxena, Saurabh

AU - Son, Yong Duck

AU - Cheon, Jun Hyuk

AU - Kim, Jae Ik

AU - Jang, Jin

AU - Lai, Jackson

AU - Chang, Jeff Hsin

AU - Heiler, Gregory

AU - Tredwell, Timothy J.

PY - 2009

Y1 - 2009

N2 - The performance uniformity of TFTs fabricated in single-crystal Silicon-on-Glass (SiOG) and ELA poly-Si substrates was investigated. The SiOG devices exhibited better electrical performance with greater uniformity in mobility, threshold voltage, and subthreshold swing. This illustrates potential advantages for SiOG in display manufacturing.

AB - The performance uniformity of TFTs fabricated in single-crystal Silicon-on-Glass (SiOG) and ELA poly-Si substrates was investigated. The SiOG devices exhibited better electrical performance with greater uniformity in mobility, threshold voltage, and subthreshold swing. This illustrates potential advantages for SiOG in display manufacturing.

UR - http://www.scopus.com/inward/record.url?scp=77954160336&partnerID=8YFLogxK

M3 - Paper

AN - SCOPUS:77954160336

SP - 261

EP - 264

T2 - 16th International Display Workshops, IDW '09

Y2 - 9 December 2009 through 11 December 2009

ER -

Comparison of corning silicon-on-glass technology and ELA poly-si TFT uniformity performance

Abstract

Conference

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