Crystalline orientation of polycrystalline silicon with disklike grains produced by silicide-mediated crystallization of amorphous silicon

The crystalline orientations of polycrystalline silicon with disklike grains were investigated. The orientations formed by silicide-mediated crystallization (SMC) of amorphous silicon (a-Si) were studied and compared with those of needlelike crystallites. The results obtained by electron backscattered diffraction and transmission electron microscopy indicate that each disk-like grain has a single orientation, but its orientation was not always the same as that of neighboring grains.