Abstract
Nondestructive technology (NDT) is the most popular method for detecting defects inside an object without harming it. A 3D tomography algorithm toolbox and an x-ray imaging system are the essential components of NDT. We fabricated a high-resolution cold cathode electron beam (HRC-beam) based on vertically aligned carbon nanotubes to accomplish this objective. Using an HRC-beam, multiple angle projection images were captured in an x-ray imaging system. This x-ray source's horizontal and vertical focal spot sizes were 0.57 and 0.49 mm, respectively. Using the homemade 3D tomography algorithm toolbox, all the multiple projection images were recreated in a 3D volume. This toolbox employs algorithms such as the radon transform and the inverse radon transform to generate the 3D volume. The matlab r2022b program was used to execute the algorithm. This study explains the development of a three-dimensional volume and the inspection of the 3D volume in a slice view using a high-resolution cold cathode electron beam and the 3D tomography algorithm toolbox. A large phantom cable was used to evaluate 3D reconstruction and void inspection inside the large phantom cable.
Original language | English |
---|---|
Article number | 033201 |
Journal | Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics |
Volume | 41 |
Issue number | 3 |
DOIs | |
Publication status | Published - 1 May 2023 |
Bibliographical note
Publisher Copyright:© 2023 Author(s).