Development of 3D tomosynthesis technique for nondestructive technology application using vertically aligned carbon nanotube-based high-resolution cold cathode electron beam

Jaydip Sawant, Yi Yin Yu, Ketan Bhotkar, Hyun Jung Jung, Gi Joon Nam, Kyu Chang Park

Research output: Contribution to journalArticlepeer-review

2 Citations (Scopus)

Abstract

Nondestructive technology (NDT) is the most popular method for detecting defects inside an object without harming it. A 3D tomography algorithm toolbox and an x-ray imaging system are the essential components of NDT. We fabricated a high-resolution cold cathode electron beam (HRC-beam) based on vertically aligned carbon nanotubes to accomplish this objective. Using an HRC-beam, multiple angle projection images were captured in an x-ray imaging system. This x-ray source's horizontal and vertical focal spot sizes were 0.57 and 0.49 mm, respectively. Using the homemade 3D tomography algorithm toolbox, all the multiple projection images were recreated in a 3D volume. This toolbox employs algorithms such as the radon transform and the inverse radon transform to generate the 3D volume. The matlab r2022b program was used to execute the algorithm. This study explains the development of a three-dimensional volume and the inspection of the 3D volume in a slice view using a high-resolution cold cathode electron beam and the 3D tomography algorithm toolbox. A large phantom cable was used to evaluate 3D reconstruction and void inspection inside the large phantom cable.

Original languageEnglish
Article number033201
JournalJournal of Vacuum Science and Technology B:Nanotechnology and Microelectronics
Volume41
Issue number3
DOIs
Publication statusPublished - 1 May 2023

Bibliographical note

Publisher Copyright:
© 2023 Author(s).

Fingerprint

Dive into the research topics of 'Development of 3D tomosynthesis technique for nondestructive technology application using vertically aligned carbon nanotube-based high-resolution cold cathode electron beam'. Together they form a unique fingerprint.

Cite this