Effect of diamond-like carbon coating on the emission characteristics of molybdenum field emitter arrays

Jae Hoon Jung; Byeong Kwon Ju; Hoon Kim; Yun Lee Hi; Suk Jae Chung; Jin Jang; Myung Hwan Oh

doi:10.1109/16.725258

Effect of diamond-like carbon coating on the emission characteristics of molybdenum field emitter arrays

Jae Hoon Jung
, Byeong Kwon Ju
, Hoon Kim
, Yun Lee Hi
, Suk Jae Chung
, Jin Jang
, Myung Hwan Oh

Research output: Contribution to journal › Article › peer-review

9 Citations (Scopus)

Abstract

We have studied the electron emission characteristics of Mo field emitter arrays (FEA's) using a diamond-like carbon (DLC) film deposited by a layer-by-layer technique using plasma enhanced chemical vapor deposition. The turn-on voltage was lowered from 55 to 30 V by a 20-nm thick hydrogen-free DLC coating and maximum emission current was increased from 166 to 831 juA. Also the gate voltage required to get the anode current of 0.1 (juA/emitter) decreases from 77 to 48 V. Furthermore the emission current from DLC coated Mo FEA's is more stable than that of noncoated Mo FEA's.

Original language	English
Pages (from-to)	2232-2237
Number of pages	6
Journal	IEEE Transactions on Electron Devices
Volume	45
Issue number	10
DOIs	https://doi.org/10.1109/16.725258
Publication status	Published - 1998

Keywords

Emission current
Emission stability
Hydrogenfree dlc
Mo fea's pecvd

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10.1109/16.725258

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title = "Effect of diamond-like carbon coating on the emission characteristics of molybdenum field emitter arrays",

abstract = "We have studied the electron emission characteristics of Mo field emitter arrays (FEA's) using a diamond-like carbon (DLC) film deposited by a layer-by-layer technique using plasma enhanced chemical vapor deposition. The turn-on voltage was lowered from 55 to 30 V by a 20-nm thick hydrogen-free DLC coating and maximum emission current was increased from 166 to 831 juA. Also the gate voltage required to get the anode current of 0.1 (juA/emitter) decreases from 77 to 48 V. Furthermore the emission current from DLC coated Mo FEA's is more stable than that of noncoated Mo FEA's.",

keywords = "Emission current, Emission stability, Hydrogenfree dlc, Mo fea's pecvd",

author = "Jung, \{Jae Hoon\} and Ju, \{Byeong Kwon\} and Hoon Kim and \{Lee Hi\}, Yun and Chung, \{Suk Jae\} and Jin Jang and Oh, \{Myung Hwan\}",

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doi = "10.1109/16.725258",

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T1 - Effect of diamond-like carbon coating on the emission characteristics of molybdenum field emitter arrays

AU - Jung, Jae Hoon

AU - Ju, Byeong Kwon

AU - Kim, Hoon

AU - Lee Hi, Yun

AU - Chung, Suk Jae

AU - Jang, Jin

AU - Oh, Myung Hwan

PY - 1998

Y1 - 1998

N2 - We have studied the electron emission characteristics of Mo field emitter arrays (FEA's) using a diamond-like carbon (DLC) film deposited by a layer-by-layer technique using plasma enhanced chemical vapor deposition. The turn-on voltage was lowered from 55 to 30 V by a 20-nm thick hydrogen-free DLC coating and maximum emission current was increased from 166 to 831 juA. Also the gate voltage required to get the anode current of 0.1 (juA/emitter) decreases from 77 to 48 V. Furthermore the emission current from DLC coated Mo FEA's is more stable than that of noncoated Mo FEA's.

AB - We have studied the electron emission characteristics of Mo field emitter arrays (FEA's) using a diamond-like carbon (DLC) film deposited by a layer-by-layer technique using plasma enhanced chemical vapor deposition. The turn-on voltage was lowered from 55 to 30 V by a 20-nm thick hydrogen-free DLC coating and maximum emission current was increased from 166 to 831 juA. Also the gate voltage required to get the anode current of 0.1 (juA/emitter) decreases from 77 to 48 V. Furthermore the emission current from DLC coated Mo FEA's is more stable than that of noncoated Mo FEA's.

KW - Emission current

KW - Emission stability

KW - Hydrogenfree dlc

KW - Mo fea's pecvd

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DO - 10.1109/16.725258

M3 - Article

AN - SCOPUS:0032186897

SN - 0018-9383

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SP - 2232

EP - 2237

JO - IEEE Transactions on Electron Devices

JF - IEEE Transactions on Electron Devices

IS - 10

ER -

Effect of diamond-like carbon coating on the emission characteristics of molybdenum field emitter arrays

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Keywords

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