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Electrically modifiable synapse array composed of metal-ferroelectric-semiconductor (MFS) FET's using SrBi2Ta2O9 thin films

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Abstract

An array of metal-ferroelectric-semiconductor field effect transistors (MFSFET's) is fabricated on a silicon-on-insulator (SOI) structure using SrBi2Ta2O9 as the gate insulator. It is demonstrated that each FET shows good characteristics as a nonvolatile analog memory due to partial polarization of the SrBi2Ta2O9 film that the array operates as an electrically modifiable synapse circuit for carrying out the weighted sum operation in an artificial neural network.

Original languageEnglish
Pages (from-to)229-231
Number of pages3
JournalIEEE Electron Device Letters
Volume20
Issue number5
DOIs
Publication statusPublished - May 1999

Bibliographical note

Funding Information:
Manuscript received August 31, 1998; revised November 30, 1998. This work was supported by a 1998 Grant-in-Aid for Scientific Research on Priority Area 07248105 and a Grant-in Aid for COE Research on Ultra-Parallel Optoelectronics 07CE2003 from the Ministry of Education, Science, Sports, and Culture in Japan.

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