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Electron emission from a carbon nanotube grown in a hole by using a triode plasma-enhanced chemical vapor deposition

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Abstract

We report on the electron emission properties of carbon nanotubes grown in holes with a triode-type direct-current (DC) plasma-enhanced chemical vapor deposition (PECVD) system. In this study, the growth of CNTs in gate holes for field-emission displays was performed by using a silicon-nitride (SiN x) capping layer on a Ni catalyst. The CNTs grown with a 3 μm hole pattern show the highest electron emission and the lowest turn-on field properties. The highest emission current of CNTs grown with a 3 μm hole pattern appears to be due to non-field screening by neighboring CNTS. Also, we can grow CNTs with a gate-hole pattern and measure the electron emission properties by using a triode structure. Two CNTs can be grown in gate holes with a 3 μm hole diameter. The electron emission anode current density is 0.9 μA/cm 2 at a 35 V gate bias and a 2.0 kV anode bias.

Original languageEnglish
Pages (from-to)1365-1368
Number of pages4
JournalJournal of the Korean Physical Society
Volume48
Issue number6
Publication statusPublished - Jun 2006

Keywords

  • CNT
  • Capping
  • Electron emission
  • Gate hole pattern
  • PECVD

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