Electron emission properties of CNT arrays grown with micro-molding in capillary (MIMIC) assisted process

Han Eol Lim; Na Young Song; Je Hwang Ryu; Jun Won Lim; Byoung Taek Son; Yi Sang Lee; Jin Jang; Kyu Chang Park

doi:10.1016/j.vacuum.2009.06.022

Electron emission properties of CNT arrays grown with micro-molding in capillary (MIMIC) assisted process

Han Eol Lim, Na Young Song, Je Hwang Ryu, Jun Won Lim, Byoung Taek Son, Yi Sang Lee, Jin Jang, Kyu Chang Park

Research output: Contribution to journal › Article › peer-review

3 Citations (Scopus)

Abstract

We have selectively fabricated carbon nanotubes (CNTs) emitter arrays with a micro mold in capillary (MIMIC) assisted process. The electron emitter growth site was fabricated by resist patterning using the MIMIC process. The pattern was uniformly transferred to the substrate and well aligned CNTs were grown. The emitter produces a turn-on field of 2.7 V/μm with a field emission current of 10 μA/cm². The electron emission current can be controlled by emitter pattern width and pitch variation.

Original language	English
Pages (from-to)	526-529
Number of pages	4
Journal	Vacuum
Volume	84
Issue number	5
DOIs	https://doi.org/10.1016/j.vacuum.2009.06.022
Publication status	Published - 10 Dec 2009

Keywords

Carbon nanotubes
Electron emission
Micro-molding in capillary (MIMIC)

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10.1016/j.vacuum.2009.06.022

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@article{16fb1a1630084646b1861a76e0cd79a1,

title = "Electron emission properties of CNT arrays grown with micro-molding in capillary (MIMIC) assisted process",

abstract = "We have selectively fabricated carbon nanotubes (CNTs) emitter arrays with a micro mold in capillary (MIMIC) assisted process. The electron emitter growth site was fabricated by resist patterning using the MIMIC process. The pattern was uniformly transferred to the substrate and well aligned CNTs were grown. The emitter produces a turn-on field of 2.7 V/μm with a field emission current of 10 μA/cm2. The electron emission current can be controlled by emitter pattern width and pitch variation.",

keywords = "Carbon nanotubes, Electron emission, Micro-molding in capillary (MIMIC)",

author = "Lim, {Han Eol} and Song, {Na Young} and Ryu, {Je Hwang} and Lim, {Jun Won} and Son, {Byoung Taek} and Lee, {Yi Sang} and Jin Jang and Park, {Kyu Chang}",

year = "2009",

month = dec,

day = "10",

doi = "10.1016/j.vacuum.2009.06.022",

language = "English",

volume = "84",

pages = "526--529",

journal = "Vacuum",

issn = "0042-207X",

publisher = "Elsevier Ltd.",

number = "5",

}

TY - JOUR

T1 - Electron emission properties of CNT arrays grown with micro-molding in capillary (MIMIC) assisted process

AU - Lim, Han Eol

AU - Song, Na Young

AU - Ryu, Je Hwang

AU - Lim, Jun Won

AU - Son, Byoung Taek

AU - Lee, Yi Sang

AU - Jang, Jin

AU - Park, Kyu Chang

PY - 2009/12/10

Y1 - 2009/12/10

N2 - We have selectively fabricated carbon nanotubes (CNTs) emitter arrays with a micro mold in capillary (MIMIC) assisted process. The electron emitter growth site was fabricated by resist patterning using the MIMIC process. The pattern was uniformly transferred to the substrate and well aligned CNTs were grown. The emitter produces a turn-on field of 2.7 V/μm with a field emission current of 10 μA/cm2. The electron emission current can be controlled by emitter pattern width and pitch variation.

AB - We have selectively fabricated carbon nanotubes (CNTs) emitter arrays with a micro mold in capillary (MIMIC) assisted process. The electron emitter growth site was fabricated by resist patterning using the MIMIC process. The pattern was uniformly transferred to the substrate and well aligned CNTs were grown. The emitter produces a turn-on field of 2.7 V/μm with a field emission current of 10 μA/cm2. The electron emission current can be controlled by emitter pattern width and pitch variation.

KW - Carbon nanotubes

KW - Electron emission

KW - Micro-molding in capillary (MIMIC)

UR - http://www.scopus.com/inward/record.url?scp=70649097152&partnerID=8YFLogxK

U2 - 10.1016/j.vacuum.2009.06.022

DO - 10.1016/j.vacuum.2009.06.022

M3 - Article

AN - SCOPUS:70649097152

SN - 0042-207X

VL - 84

SP - 526

EP - 529

JO - Vacuum

JF - Vacuum

IS - 5

ER -

Electron emission properties of CNT arrays grown with micro-molding in capillary (MIMIC) assisted process

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Keywords

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