Abstract
The electron emission properties of carbon nanotubes (CNTs), grown with selective positioning technique, were studied with various number of emitters. We have grown well-aligned carbon nanotube arrays on selective areas by triode-type direct current (DC) plasma enhanced chemical vapor deposition (PECVD) at the substrate temperature of 580 °C. The CNTs are uniformly grown on various islands, which defined by selective positioning technology. Various numbers of island-emitters were grown and measure the electron emission properties by using diode structure. The total electron emission characteristic shows very linear properties with number of island emitters. Emission current of the one-emitter island is 7.8 nA at 9 V//μm with 50 μm pitch, 10 μm island diameter.
Original language | English |
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Pages | 1857-1860 |
Number of pages | 4 |
Publication status | Published - 2006 |
Event | 13th International Display Workshops, IDW '06 - Otsu, Japan Duration: 6 Dec 2006 → 6 Dec 2006 |
Conference
Conference | 13th International Display Workshops, IDW '06 |
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Country/Territory | Japan |
City | Otsu |
Period | 6/12/06 → 6/12/06 |