Engineering Stress in Thin Films: An Innovative Pathway Toward 3D Micro and Nanosystems
- Thanh An Truong
- , Tuan Khoa Nguyen
- , Hangbo Zhao
- , Nhat Khuong Nguyen
- , Toan Dinh
- , Yoonseok Park
- , Thanh Nguyen
- , Yusuke Yamauchi
- , Nam Trung Nguyen
- , Hoang Phuong Phan
Research output: Contribution to journal › Review article › peer-review
33
Citations
(Scopus)