Abstract
We developed novel cone-shaped emitters with individual carbon nanotips using the resist-assisted patterning process. The novel cone-shaped nanotip emitters were arranged in an array with many nano emitters in pre-patterned diameters of 3 µm. The cone-shaped nanotip emitters consist of a number of carbon-based nanostructures such as nanotubes and/or nanofibers with silicon and nitrogen elements at the periphery of each element. The cone-shaped nano-emitters strongly adhered to the substrate due to the large area bottom contact which is covered with diffused silicon elements. The growth mechanism and enhanced electron emission of cone-shaped nanotip emitters was discussed.
Original language | English |
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Pages (from-to) | 135-138 |
Number of pages | 4 |
Journal | Digest of Technical Papers - SID International Symposium |
Volume | 40 |
Issue number | 1 |
DOIs | |
Publication status | Published - 2009 |
Event | 2009 Vehicles and Photons Symposium - Dearborn, MI, United States Duration: 15 Oct 2009 → 16 Oct 2009 |
Bibliographical note
Publisher Copyright:© 2009 SID.