Abstract
In this study, we investigated the effect of electron spot size on EUV generation by adapting a focusing electrode. We have studied and demonstrated high quality, debris free and low cost of EUV lighting source by C-beam (cold cathode beam) without focusing electrode. By reducing focal spot size (FSS), current density of EUV was improved. By optimizing focusing electrode conditions, we could achieve 32% decrease of Full Width at Half Maximum (FWHM) with minimal loss of anode current.
| Original language | English |
|---|---|
| Title of host publication | 2024 37th International Vacuum Nanoelectronics Conference, IVNC 2024 |
| Publisher | Institute of Electrical and Electronics Engineers Inc. |
| ISBN (Electronic) | 9798350379754 |
| DOIs | |
| Publication status | Published - 2024 |
| Event | 37th International Vacuum Nanoelectronics Conference, IVNC 2024 - Brno, Czech Republic Duration: 15 Jul 2024 → 19 Jul 2024 |
Publication series
| Name | 2024 37th International Vacuum Nanoelectronics Conference, IVNC 2024 |
|---|
Conference
| Conference | 37th International Vacuum Nanoelectronics Conference, IVNC 2024 |
|---|---|
| Country/Territory | Czech Republic |
| City | Brno |
| Period | 15/07/24 → 19/07/24 |
Bibliographical note
Publisher Copyright:© 2024 IEEE.
Keywords
- C-beam
- EUV (Extreme Ultraviolet)
- Focusing effect
- Focusing electrode
- Full width at half maximum (FWHM)
- current density