Enhancement of electron emission efficiency and stability of molybdenum-tip field emitter array by diamond like carbon coating

Jae Hoon Jung; Byeong Kwon Ju; Yun Hi Lee; Jin Jang; Myung Hwan Oh

doi:10.1109/55.568760

Enhancement of electron emission efficiency and stability of molybdenum-tip field emitter array by diamond like carbon coating

Jae Hoon Jung
, Byeong Kwon Ju
, Yun Hi Lee
, Jin Jang
, Myung Hwan Oh

Research output: Contribution to journal › Article › peer-review

37 Citations (Scopus)

Abstract

The effect of Diamond Like Carbon (DLC) films, coated by a layer-by-layer technique using PECVD (plasma enhanced chemical vapor deposition) on the electron emission characteristics of Molybdenum (Mo)-tip field emitter array (FEA) is examined. The turn-on voltage was lowered from 80 V for the Mo-tip to 65 V for the DLC-coated Mo-tip FEA while the maximum emission current was increased from 140 μA for the Mo-tip to 320 μA for the DLC-coated Mo-tip FEA composed of 900 emitters. For an anode current of 0.1 (μA/emitter) the gate voltage for the DLC-coated Mo-tip FEA and Mo-tip FEA was about 87 and 107 V, respectively. It was also confirmed that the emission current of a DLC-coated Mo-tip FEA was more stable than that of a Mo-tip FEA.

Original language	English
Pages (from-to)	197-199
Number of pages	3
Journal	IEEE Electron Device Letters
Volume	18
Issue number	5
DOIs	https://doi.org/10.1109/55.568760
Publication status	Published - May 1997

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title = "Enhancement of electron emission efficiency and stability of molybdenum-tip field emitter array by diamond like carbon coating",

abstract = "The effect of Diamond Like Carbon (DLC) films, coated by a layer-by-layer technique using PECVD (plasma enhanced chemical vapor deposition) on the electron emission characteristics of Molybdenum (Mo)-tip field emitter array (FEA) is examined. The turn-on voltage was lowered from 80 V for the Mo-tip to 65 V for the DLC-coated Mo-tip FEA while the maximum emission current was increased from 140 μA for the Mo-tip to 320 μA for the DLC-coated Mo-tip FEA composed of 900 emitters. For an anode current of 0.1 (μA/emitter) the gate voltage for the DLC-coated Mo-tip FEA and Mo-tip FEA was about 87 and 107 V, respectively. It was also confirmed that the emission current of a DLC-coated Mo-tip FEA was more stable than that of a Mo-tip FEA.",

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TY - JOUR

T1 - Enhancement of electron emission efficiency and stability of molybdenum-tip field emitter array by diamond like carbon coating

AU - Jung, Jae Hoon

AU - Ju, Byeong Kwon

AU - Lee, Yun Hi

AU - Jang, Jin

AU - Oh, Myung Hwan

PY - 1997/5

Y1 - 1997/5

N2 - The effect of Diamond Like Carbon (DLC) films, coated by a layer-by-layer technique using PECVD (plasma enhanced chemical vapor deposition) on the electron emission characteristics of Molybdenum (Mo)-tip field emitter array (FEA) is examined. The turn-on voltage was lowered from 80 V for the Mo-tip to 65 V for the DLC-coated Mo-tip FEA while the maximum emission current was increased from 140 μA for the Mo-tip to 320 μA for the DLC-coated Mo-tip FEA composed of 900 emitters. For an anode current of 0.1 (μA/emitter) the gate voltage for the DLC-coated Mo-tip FEA and Mo-tip FEA was about 87 and 107 V, respectively. It was also confirmed that the emission current of a DLC-coated Mo-tip FEA was more stable than that of a Mo-tip FEA.

AB - The effect of Diamond Like Carbon (DLC) films, coated by a layer-by-layer technique using PECVD (plasma enhanced chemical vapor deposition) on the electron emission characteristics of Molybdenum (Mo)-tip field emitter array (FEA) is examined. The turn-on voltage was lowered from 80 V for the Mo-tip to 65 V for the DLC-coated Mo-tip FEA while the maximum emission current was increased from 140 μA for the Mo-tip to 320 μA for the DLC-coated Mo-tip FEA composed of 900 emitters. For an anode current of 0.1 (μA/emitter) the gate voltage for the DLC-coated Mo-tip FEA and Mo-tip FEA was about 87 and 107 V, respectively. It was also confirmed that the emission current of a DLC-coated Mo-tip FEA was more stable than that of a Mo-tip FEA.

UR - https://www.scopus.com/pages/publications/0031147192

U2 - 10.1109/55.568760

DO - 10.1109/55.568760

M3 - Article

AN - SCOPUS:0031147192

SN - 0741-3106

VL - 18

SP - 197

EP - 199

JO - IEEE Electron Device Letters

JF - IEEE Electron Device Letters

IS - 5

ER -

Enhancement of electron emission efficiency and stability of molybdenum-tip field emitter array by diamond like carbon coating

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