Abstract
This paper presents a method to measure angular velocity with two silicon-based MEMS acceleration sensors which have the resolution of 0.08 mg. This paper proposes measurement results using the technique to compensate the alignment error and estimate an angular velocity with two acceleration sensors fabricated by sacrificial bulk micromachining (SBM) process. The technique also estimates an angular velocity of a commercial cleaning robot, which has been tried to make the unit cost of production lower, by using two acceleration sensors without using a gyroscope.
Original language | English |
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Title of host publication | 4th IFAC Symposium on Mechatronic Systems, MX 2006 |
Publisher | IFAC Secretariat |
Pages | 549-553 |
Number of pages | 5 |
Edition | PART 1 |
ISBN (Print) | 9783902661173 |
DOIs | |
Publication status | Published - 2006 |
Publication series
Name | IFAC Proceedings Volumes (IFAC-PapersOnline) |
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Number | PART 1 |
Volume | 4 |
ISSN (Print) | 1474-6670 |
Bibliographical note
Funding Information:This research was supported by the Intelligent Robot Sensor Project sponsored by the Ministry of Information and Communication under the contract project code A1100-0400-0058.
Copyright:
Copyright 2021 Elsevier B.V., All rights reserved.
Keywords
- Accelerometers
- Alignment error
- Gyro-free INS