EUV lighting by the cold cathode C-beam irradiation technique

Bishwa Chandra Adhikari, Sung Tae Yoo, Kyu Chang Park

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

2 Citations (Scopus)

Fingerprint

Dive into the research topics of 'EUV lighting by the cold cathode C-beam irradiation technique'. Together they form a unique fingerprint.

Engineering