TY - JOUR
T1 - Extrapolation of critical thickness of GaN thin films from lattice constant data using synchrotron X-ray
AU - Kim, Chinkyo
AU - Robinson, I. K.
AU - Myoung, Jaemin
AU - Shim, Kyuhwan
AU - Kim, Kyekyoon
AU - Yoo, Myung Cheol
N1 - Copyright:
Copyright 2020 Elsevier B.V., All rights reserved.
PY - 1996
Y1 - 1996
N2 - In some materials, Van der Merwe's equilibrium theory of strain relief is believed to explain the sudden transition from pseudomorphic growth of a thin film to a progressively relaxed state. We show, for the first time for GaN, how an accurate estimate of the critical thickness of a thin film can be extrapolated from suitable measurements of lattice constants as a function of film thickness using synchrotron X-ray. We do this both for an elementary elastic energy function, in which the interactions between the dislocations are ignored, and for a more realistic energy estimate due to Kasper. The method is found to work quantitatively for thin films of GaN on AlN. The critical thickness is determined to be 29±4 angstroms.
AB - In some materials, Van der Merwe's equilibrium theory of strain relief is believed to explain the sudden transition from pseudomorphic growth of a thin film to a progressively relaxed state. We show, for the first time for GaN, how an accurate estimate of the critical thickness of a thin film can be extrapolated from suitable measurements of lattice constants as a function of film thickness using synchrotron X-ray. We do this both for an elementary elastic energy function, in which the interactions between the dislocations are ignored, and for a more realistic energy estimate due to Kasper. The method is found to work quantitatively for thin films of GaN on AlN. The critical thickness is determined to be 29±4 angstroms.
UR - http://www.scopus.com/inward/record.url?scp=0030404021&partnerID=8YFLogxK
U2 - 10.1557/proc-423-557
DO - 10.1557/proc-423-557
M3 - Conference article
AN - SCOPUS:0030404021
SN - 0272-9172
VL - 423
SP - 557
EP - 561
JO - Materials Research Society Symposium Proceedings
JF - Materials Research Society Symposium Proceedings
T2 - Proceedings of the 1996 MRS Spring Symposium
Y2 - 8 April 1996 through 12 April 1996
ER -