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Extrapolation of critical thickness of GaN thin films from lattice constant data using synchrotron X-ray

  • Chinkyo Kim
  • , I. K. Robinson
  • , Jaemin Myoung
  • , Kyuhwan Shim
  • , Kyekyoon Kim
  • , Myung Cheol Yoo

Research output: Contribution to journalConference articlepeer-review

2 Citations (Scopus)

Abstract

In some materials, Van der Merwe's equilibrium theory of strain relief is believed to explain the sudden transition from pseudomorphic growth of a thin film to a progressively relaxed state. We show, for the first time for GaN, how an accurate estimate of the critical thickness of a thin film can be extrapolated from suitable measurements of lattice constants as a function of film thickness using synchrotron X-ray. We do this both for an elementary elastic energy function, in which the interactions between the dislocations are ignored, and for a more realistic energy estimate due to Kasper. The method is found to work quantitatively for thin films of GaN on AlN. The critical thickness is determined to be 29±4 angstroms.

Original languageEnglish
Pages (from-to)557-561
Number of pages5
JournalMaterials Research Society Symposium - Proceedings
Volume423
DOIs
Publication statusPublished - 1996
EventProceedings of the 1996 MRS Spring Symposium - San Francisco, CA, USA
Duration: 8 Apr 199612 Apr 1996

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