Abstract
Electron emission currents and stability in the silicon-Tip field emission arrays (FEAs) have been improved by silicide formation on silicon using Nb. The formation of Nb-silicide was confirmed by X-Ray diffraction data. The turn-on voltage of silicon-Tip FEAs was decreased from 64 to 47 V and the emission current fluctuation was decreased from 5% to 2%.
| Original language | English |
|---|---|
| Title of host publication | Proceedings of the 5th Asian Symposium on Information Display, ASID 1999 |
| Editors | Han-Ping D. Shieh, I-Wei Wu |
| Publisher | Institute of Electrical and Electronics Engineers Inc. |
| Pages | 49-52 |
| Number of pages | 4 |
| ISBN (Electronic) | 9579734798, 9789579734790 |
| DOIs | |
| Publication status | Published - 1999 |
| Event | 5th Asian Symposium on Information Display, ASID 1999 - Hsinchu, Taiwan, Province of China Duration: 17 Mar 1999 → 19 Mar 1999 |
Publication series
| Name | Proceedings of the 5th Asian Symposium on Information Display, ASID 1999 |
|---|
Conference
| Conference | 5th Asian Symposium on Information Display, ASID 1999 |
|---|---|
| Country/Territory | Taiwan, Province of China |
| City | Hsinchu |
| Period | 17/03/99 → 19/03/99 |
Bibliographical note
Publisher Copyright:© 1999 SID Taipei Chapter.
Keywords
- Field Emission Arrays(FEAs)
- Nb(Niobium)-Silicide.
- Silicon-Tip
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