Fabrication of antireflection nanostructures on GaAs by holographic lithography for device applications

Y. M. Song; S. Y. Bae; J. S. Yu; Y. T. Lee

Fabrication of antireflection nanostructures on GaAs by holographic lithography for device applications

Y. M. Song
, S. Y. Bae
, J. S. Yu
, Y. T. Lee

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

Abstract

We demonstrate the fabrication of antireflection nanostructures on GaAs using holographic lithography. Measured results of the fabricated nanostructures are in good agreement with the calculated values using a RCWA model, effectively suppressing the surface reflection over visible and near-infrared ranges.

Original language	English
Title of host publication	Conference on Lasers and Electro-Optics, CLEO 2009
Publication status	Published - 2009
Event	Conference on Lasers and Electro-Optics, CLEO 2009 - Baltimore, MD, United States Duration: 31 May 2009 → 5 Jun 2009

Publication series

Name	Optics InfoBase Conference Papers
ISSN (Electronic)	2162-2701

Conference

Conference	Conference on Lasers and Electro-Optics, CLEO 2009
Country/Territory	United States
City	Baltimore, MD
Period	31/05/09 → 5/06/09

Cite this

@inproceedings{ef5990851fc24f68bc3292dc1e95b4cf,

title = "Fabrication of antireflection nanostructures on GaAs by holographic lithography for device applications",

abstract = "We demonstrate the fabrication of antireflection nanostructures on GaAs using holographic lithography. Measured results of the fabricated nanostructures are in good agreement with the calculated values using a RCWA model, effectively suppressing the surface reflection over visible and near-infrared ranges.",

author = "Song, \{Y. M.\} and Bae, \{S. Y.\} and Yu, \{J. S.\} and Lee, \{Y. T.\}",

year = "2009",

language = "English",

isbn = "9781557528698",

series = "Optics InfoBase Conference Papers",

booktitle = "Conference on Lasers and Electro-Optics, CLEO 2009",

}

TY - GEN

T1 - Fabrication of antireflection nanostructures on GaAs by holographic lithography for device applications

AU - Song, Y. M.

AU - Bae, S. Y.

AU - Yu, J. S.

AU - Lee, Y. T.

PY - 2009

Y1 - 2009

N2 - We demonstrate the fabrication of antireflection nanostructures on GaAs using holographic lithography. Measured results of the fabricated nanostructures are in good agreement with the calculated values using a RCWA model, effectively suppressing the surface reflection over visible and near-infrared ranges.

AB - We demonstrate the fabrication of antireflection nanostructures on GaAs using holographic lithography. Measured results of the fabricated nanostructures are in good agreement with the calculated values using a RCWA model, effectively suppressing the surface reflection over visible and near-infrared ranges.

UR - https://www.scopus.com/pages/publications/84894029928

M3 - Conference contribution

AN - SCOPUS:84894029928

SN - 9781557528698

T3 - Optics InfoBase Conference Papers

BT - Conference on Lasers and Electro-Optics, CLEO 2009

T2 - Conference on Lasers and Electro-Optics, CLEO 2009

Y2 - 31 May 2009 through 5 June 2009

ER -

Fabrication of antireflection nanostructures on GaAs by holographic lithography for device applications

Abstract

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