Abstract
We developed high current electron emission carbon nanotube cold cathode electron sources for high power vacuum devices. To develop high power devices with electron beam, electron emission current is most important. More than 100 rnA electron emission current achieved with the optimized CNT fabrication process and its structure. The electron emission current limited by the conductivity of CNT emitters, the higher conducting emitters show higher electron emission current. Detail on the fabrication process and performance of electron beam would be presented.
Original language | English |
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Title of host publication | 2019 International Vacuum Electronics Conference, IVEC 2019 |
Publisher | Institute of Electrical and Electronics Engineers Inc. |
ISBN (Electronic) | 9781538675342 |
DOIs | |
Publication status | Published - Apr 2019 |
Event | 2019 International Vacuum Electronics Conference, IVEC 2019 - Busan, Korea, Republic of Duration: 28 Apr 2019 → 1 May 2019 |
Publication series
Name | 2019 International Vacuum Electronics Conference, IVEC 2019 |
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Conference
Conference | 2019 International Vacuum Electronics Conference, IVEC 2019 |
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Country/Territory | Korea, Republic of |
City | Busan |
Period | 28/04/19 → 1/05/19 |
Bibliographical note
Publisher Copyright:© 2019 IEEE.
Keywords
- carbon nanotubes (CNTs)
- cold cathode emitters
- vacuum electronics