Fabrication of high performance electron beam for electron microscope applications

Ha Rim Lee, Kyu Chang Park

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

Electron beam with carbon nanotube cold cathode(C-beam) developed for various vacuum electronic devices, especially for the electron microscope application. High brightness electron beam with CNT cold cathode could fabricated with self-standing vertically aligned CNT emitter. We could obtain high resolution C-beam with less than 77μm in diameter on phosphor images.

Original languageEnglish
Title of host publication24th International Display Workshops, IDW 2017
PublisherInternational Display Workshops
Pages1299-1301
Number of pages3
ISBN (Electronic)9781510858992
Publication statusPublished - 2017
Event24th International Display Workshops, IDW 2017 - Sendai, Japan
Duration: 6 Dec 20178 Dec 2017

Publication series

NameProceedings of the International Display Workshops
Volume2
ISSN (Print)1883-2490

Conference

Conference24th International Display Workshops, IDW 2017
Country/TerritoryJapan
CitySendai
Period6/12/178/12/17

Bibliographical note

Publisher Copyright:
© 2017 Proceedings of the International Display Workshops. All rights reserved.

Keywords

  • Carbon nanotube
  • Cold cathode
  • Electron beam
  • Joule heating

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