Fabrication of high performance electron beam with functional silicon coated CNT cold cathode

Jung Su Kang, Jung Hyun Kim, Kyu Chang Park

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

For high current density electron beam fabrication with the cold cathode, we studied optimization of process conditions using a RAP process with DC-PECVD technique. The CNT emitter with lower resistance is most importance for higher electron emission current and longer life-time. The resistance of CNT emitter attribute visible lighting on the emitters tip area by Joule heating. With optimized growth conditions, we could achieve the emission current reaches 20.5 mA in the emission area of 0.08 cm2.

Original languageEnglish
Title of host publication24th International Display Workshops, IDW 2017
PublisherInternational Display Workshops
Pages1391-1393
Number of pages3
ISBN (Electronic)9781510858992
Publication statusPublished - 2017
Event24th International Display Workshops, IDW 2017 - Sendai, Japan
Duration: 6 Dec 20178 Dec 2017

Publication series

NameProceedings of the International Display Workshops
Volume2
ISSN (Print)1883-2490

Conference

Conference24th International Display Workshops, IDW 2017
Country/TerritoryJapan
CitySendai
Period6/12/178/12/17

Bibliographical note

Publisher Copyright:
© 2017 Proceedings of the International Display Workshops. All rights reserved.

Keywords

  • Carbon nanotube
  • Cold cathode
  • Electron beam
  • Joule heating

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