Abstract
For high current density electron beam fabrication with the cold cathode, we studied optimization of process conditions using a RAP process with DC-PECVD technique. The CNT emitter with lower resistance is most importance for higher electron emission current and longer life-time. The resistance of CNT emitter attribute visible lighting on the emitters tip area by Joule heating. With optimized growth conditions, we could achieve the emission current reaches 20.5 mA in the emission area of 0.08 cm2.
Original language | English |
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Title of host publication | 24th International Display Workshops, IDW 2017 |
Publisher | International Display Workshops |
Pages | 1391-1393 |
Number of pages | 3 |
ISBN (Electronic) | 9781510858992 |
Publication status | Published - 2017 |
Event | 24th International Display Workshops, IDW 2017 - Sendai, Japan Duration: 6 Dec 2017 → 8 Dec 2017 |
Publication series
Name | Proceedings of the International Display Workshops |
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Volume | 2 |
ISSN (Print) | 1883-2490 |
Conference
Conference | 24th International Display Workshops, IDW 2017 |
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Country/Territory | Japan |
City | Sendai |
Period | 6/12/17 → 8/12/17 |
Bibliographical note
Publisher Copyright:© 2017 Proceedings of the International Display Workshops. All rights reserved.
Keywords
- Carbon nanotube
- Cold cathode
- Electron beam
- Joule heating