Fabrication of high resolution electron source for microscope application

Ha Rim Lee; Kyu Chang Park

doi:10.1109/IVEC.2019.8745088

Fabrication of high resolution electron source for microscope application

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

Abstract

A reliable source of electrons to observe an object is one of the most important part of a microscope. The technology has been developed rapidly with the goal of complete computer control. This state is the most advanced state for field emission sources. However, the next generation of field emitters is still under development. We evaluated whether our carbon nanotube (CNT) emitters were suitable for electron microscope such as, angular current density, virtual source size and brightness. Various emitters were measured, and it was found that electrical and structural properties affect the brightness.

Original language	English
Title of host publication	2019 International Vacuum Electronics Conference, IVEC 2019
Publisher	Institute of Electrical and Electronics Engineers Inc.
ISBN (Electronic)	9781538675342
DOIs	https://doi.org/10.1109/IVEC.2019.8745088
Publication status	Published - Apr 2019
Event	2019 International Vacuum Electronics Conference, IVEC 2019 - Busan, Korea, Republic of Duration: 28 Apr 2019 → 1 May 2019

Publication series

Name	2019 International Vacuum Electronics Conference, IVEC 2019

Conference

Conference	2019 International Vacuum Electronics Conference, IVEC 2019
Country/Territory	Korea, Republic of
City	Busan
Period	28/04/19 → 1/05/19

Bibliographical note

Publisher Copyright:
© 2019 IEEE.

Keywords

carbon nanotube
electron beam column
field emission
high resolution

Access to Document

10.1109/IVEC.2019.8745088

Cite this

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title = "Fabrication of high resolution electron source for microscope application",

abstract = "A reliable source of electrons to observe an object is one of the most important part of a microscope. The technology has been developed rapidly with the goal of complete computer control. This state is the most advanced state for field emission sources. However, the next generation of field emitters is still under development. We evaluated whether our carbon nanotube (CNT) emitters were suitable for electron microscope such as, angular current density, virtual source size and brightness. Various emitters were measured, and it was found that electrical and structural properties affect the brightness.",

keywords = "carbon nanotube, electron beam column, field emission, high resolution",

author = "Lee, {Ha Rim} and Park, {Kyu Chang}",

note = "Publisher Copyright: {\textcopyright} 2019 IEEE.; 2019 International Vacuum Electronics Conference, IVEC 2019 ; Conference date: 28-04-2019 Through 01-05-2019",

year = "2019",

month = apr,

doi = "10.1109/IVEC.2019.8745088",

language = "English",

series = "2019 International Vacuum Electronics Conference, IVEC 2019",

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Lee, HR & Park, KC 2019, Fabrication of high resolution electron source for microscope application. in 2019 International Vacuum Electronics Conference, IVEC 2019., 8745088, 2019 International Vacuum Electronics Conference, IVEC 2019, Institute of Electrical and Electronics Engineers Inc., 2019 International Vacuum Electronics Conference, IVEC 2019, Busan, Korea, Republic of, 28/04/19. https://doi.org/10.1109/IVEC.2019.8745088

Fabrication of high resolution electron source for microscope application. / Lee, Ha Rim; Park, Kyu Chang.
2019 International Vacuum Electronics Conference, IVEC 2019. Institute of Electrical and Electronics Engineers Inc., 2019. 8745088 (2019 International Vacuum Electronics Conference, IVEC 2019).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

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AB - A reliable source of electrons to observe an object is one of the most important part of a microscope. The technology has been developed rapidly with the goal of complete computer control. This state is the most advanced state for field emission sources. However, the next generation of field emitters is still under development. We evaluated whether our carbon nanotube (CNT) emitters were suitable for electron microscope such as, angular current density, virtual source size and brightness. Various emitters were measured, and it was found that electrical and structural properties affect the brightness.

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KW - electron beam column

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M3 - Conference contribution

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T3 - 2019 International Vacuum Electronics Conference, IVEC 2019

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ER -

Fabrication of high resolution electron source for microscope application

Abstract

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Bibliographical note

Keywords

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