Fabrication of highly stable carbon nanotube electron beams(C-beam)

Jung Su Kang, Su Woong Lee, Ha Rim Lee, Ji Hwan Hong, Shikili Callixte, Min Tae Chung, Kyu Chang Park

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

1 Citation (Scopus)

Abstract

We optimized the triode structure for carbon nanotube electron beam(C-beam) application with carbon nanotube emitters grown with resist-assisted pattering process. The CNT emitters grown through the RAP process have a structure in which a number of CNTs are congregated, and the graphitization post-treatment process proceeded in order to enhance their adhesive strength and stability. The gate mesh was self-aligned with the carbon nanotube island for lower leakage current, resulting higher electron emission current and transmission ratio. With the optimized triode structure, the emission current show high performance with less than 1 cm2 area and C-beams operated more than 500 hours with constant current mode and DC driving.

Original languageEnglish
Title of host publicationIVNC 2015 - Technical Digest
Subtitle of host publication28th International Vacuum Nanoelectronics Conference
EditorsQionghui Zou, Juncong She, Peng Ye, Jun Chen, Shaozhi Deng
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages92-93
Number of pages2
ISBN (Electronic)9781467393577
DOIs
Publication statusPublished - 26 Aug 2015
Event28th International Vacuum Nanoelectronics Conference, IVNC 2015 - Guangzhou, China
Duration: 13 Jul 201517 Jul 2015

Publication series

NameIVNC 2015 - Technical Digest: 28th International Vacuum Nanoelectronics Conference

Conference

Conference28th International Vacuum Nanoelectronics Conference, IVNC 2015
Country/TerritoryChina
CityGuangzhou
Period13/07/1517/07/15

Bibliographical note

Publisher Copyright:
© 2015 IEEE.

Keywords

  • CNT
  • Field emission

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