Abstract
We optimized the triode structure for carbon nanotube electron beam(C-beam) application with carbon nanotube emitters grown with resist-assisted pattering process. The CNT emitters grown through the RAP process have a structure in which a number of CNTs are congregated, and the graphitization post-treatment process proceeded in order to enhance their adhesive strength and stability. The gate mesh was self-aligned with the carbon nanotube island for lower leakage current, resulting higher electron emission current and transmission ratio. With the optimized triode structure, the emission current show high performance with less than 1 cm2 area and C-beams operated more than 500 hours with constant current mode and DC driving.
Original language | English |
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Title of host publication | IVNC 2015 - Technical Digest |
Subtitle of host publication | 28th International Vacuum Nanoelectronics Conference |
Editors | Qionghui Zou, Juncong She, Peng Ye, Jun Chen, Shaozhi Deng |
Publisher | Institute of Electrical and Electronics Engineers Inc. |
Pages | 92-93 |
Number of pages | 2 |
ISBN (Electronic) | 9781467393577 |
DOIs | |
Publication status | Published - 26 Aug 2015 |
Event | 28th International Vacuum Nanoelectronics Conference, IVNC 2015 - Guangzhou, China Duration: 13 Jul 2015 → 17 Jul 2015 |
Publication series
Name | IVNC 2015 - Technical Digest: 28th International Vacuum Nanoelectronics Conference |
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Conference
Conference | 28th International Vacuum Nanoelectronics Conference, IVNC 2015 |
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Country/Territory | China |
City | Guangzhou |
Period | 13/07/15 → 17/07/15 |
Bibliographical note
Publisher Copyright:© 2015 IEEE.
Keywords
- CNT
- Field emission