Fabrication of highly stable electron beams with CNT cold cathode

Jung Su Kang; Jung Hyun Kim; Kyu Chang Park

doi:10.1109/IVNC.2017.8051573

Fabrication of highly stable electron beams with CNT cold cathode

Jung Su Kang, Jung Hyun Kim, Kyu Chang Park

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

2 Citations (Scopus)

Abstract

We fabricated a high performance electron beam for the vacuum electronic devices with carbon nanotube (CNT) cathode. For the vacuum electronic devices application, a structure of cold cathode should be highly adhere on cathode substrate and endure a resistive heating during electron emission. For fabrication of stable electron beam, we optimized the CNT emitters and the triode structure. The structural properties of CNT emitters could be enhanced with functional coating on CNT surfaces. In this study, we developed silicon functional coating technique on CNT emitters and enhanced and stable electron emission with the coating.

Original language	English
Title of host publication	2017 30th International Vacuum Nanoelectronics Conference, IVNC 2017
Editors	Christoph Langer, Robert Lawrowski
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	124-125
Number of pages	2
ISBN (Electronic)	9781509039753
DOIs	https://doi.org/10.1109/IVNC.2017.8051573
Publication status	Published - 26 Sept 2017
Event	30th International Vacuum Nanoelectronics Conference, IVNC 2017 - Regensburg, Germany Duration: 10 Jul 2017 → 14 Jul 2017

Publication series

Name	2017 30th International Vacuum Nanoelectronics Conference, IVNC 2017

Conference

Conference	30th International Vacuum Nanoelectronics Conference, IVNC 2017
Country/Territory	Germany
City	Regensburg
Period	10/07/17 → 14/07/17

Bibliographical note

Publisher Copyright:
© 2017 IEEE.

Keywords

PECVD
Si
carbon nanotube(CNT)

Access to Document

10.1109/IVNC.2017.8051573

Cite this

Kang, J. S., Kim, J. H., & Park, K. C. (2017). Fabrication of highly stable electron beams with CNT cold cathode. In C. Langer, & R. Lawrowski (Eds.), 2017 30th International Vacuum Nanoelectronics Conference, IVNC 2017 (pp. 124-125). Article 8051573 (2017 30th International Vacuum Nanoelectronics Conference, IVNC 2017). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/IVNC.2017.8051573

Kang, Jung Su ; Kim, Jung Hyun ; Park, Kyu Chang. / Fabrication of highly stable electron beams with CNT cold cathode. 2017 30th International Vacuum Nanoelectronics Conference, IVNC 2017. editor / Christoph Langer ; Robert Lawrowski. Institute of Electrical and Electronics Engineers Inc., 2017. pp. 124-125 (2017 30th International Vacuum Nanoelectronics Conference, IVNC 2017).

@inproceedings{9dd98735833645a6ac141eb45197f836,

title = "Fabrication of highly stable electron beams with CNT cold cathode",

abstract = "We fabricated a high performance electron beam for the vacuum electronic devices with carbon nanotube (CNT) cathode. For the vacuum electronic devices application, a structure of cold cathode should be highly adhere on cathode substrate and endure a resistive heating during electron emission. For fabrication of stable electron beam, we optimized the CNT emitters and the triode structure. The structural properties of CNT emitters could be enhanced with functional coating on CNT surfaces. In this study, we developed silicon functional coating technique on CNT emitters and enhanced and stable electron emission with the coating.",

keywords = "PECVD, Si, carbon nanotube(CNT)",

author = "Kang, {Jung Su} and Kim, {Jung Hyun} and Park, {Kyu Chang}",

note = "Publisher Copyright: {\textcopyright} 2017 IEEE.; 30th International Vacuum Nanoelectronics Conference, IVNC 2017 ; Conference date: 10-07-2017 Through 14-07-2017",

year = "2017",

month = sep,

day = "26",

doi = "10.1109/IVNC.2017.8051573",

language = "English",

series = "2017 30th International Vacuum Nanoelectronics Conference, IVNC 2017",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

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Kang, JS, Kim, JH & Park, KC 2017, Fabrication of highly stable electron beams with CNT cold cathode. in C Langer & R Lawrowski (eds), 2017 30th International Vacuum Nanoelectronics Conference, IVNC 2017., 8051573, 2017 30th International Vacuum Nanoelectronics Conference, IVNC 2017, Institute of Electrical and Electronics Engineers Inc., pp. 124-125, 30th International Vacuum Nanoelectronics Conference, IVNC 2017, Regensburg, Germany, 10/07/17. https://doi.org/10.1109/IVNC.2017.8051573

Fabrication of highly stable electron beams with CNT cold cathode. / Kang, Jung Su; Kim, Jung Hyun; Park, Kyu Chang.
2017 30th International Vacuum Nanoelectronics Conference, IVNC 2017. ed. / Christoph Langer; Robert Lawrowski. Institute of Electrical and Electronics Engineers Inc., 2017. p. 124-125 8051573 (2017 30th International Vacuum Nanoelectronics Conference, IVNC 2017).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - Fabrication of highly stable electron beams with CNT cold cathode

AU - Kang, Jung Su

AU - Kim, Jung Hyun

AU - Park, Kyu Chang

PY - 2017/9/26

Y1 - 2017/9/26

N2 - We fabricated a high performance electron beam for the vacuum electronic devices with carbon nanotube (CNT) cathode. For the vacuum electronic devices application, a structure of cold cathode should be highly adhere on cathode substrate and endure a resistive heating during electron emission. For fabrication of stable electron beam, we optimized the CNT emitters and the triode structure. The structural properties of CNT emitters could be enhanced with functional coating on CNT surfaces. In this study, we developed silicon functional coating technique on CNT emitters and enhanced and stable electron emission with the coating.

AB - We fabricated a high performance electron beam for the vacuum electronic devices with carbon nanotube (CNT) cathode. For the vacuum electronic devices application, a structure of cold cathode should be highly adhere on cathode substrate and endure a resistive heating during electron emission. For fabrication of stable electron beam, we optimized the CNT emitters and the triode structure. The structural properties of CNT emitters could be enhanced with functional coating on CNT surfaces. In this study, we developed silicon functional coating technique on CNT emitters and enhanced and stable electron emission with the coating.

KW - PECVD

KW - Si

KW - carbon nanotube(CNT)

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U2 - 10.1109/IVNC.2017.8051573

DO - 10.1109/IVNC.2017.8051573

M3 - Conference contribution

AN - SCOPUS:85032827840

T3 - 2017 30th International Vacuum Nanoelectronics Conference, IVNC 2017

SP - 124

EP - 125

BT - 2017 30th International Vacuum Nanoelectronics Conference, IVNC 2017

A2 - Langer, Christoph

A2 - Lawrowski, Robert

PB - Institute of Electrical and Electronics Engineers Inc.

T2 - 30th International Vacuum Nanoelectronics Conference, IVNC 2017

Y2 - 10 July 2017 through 14 July 2017

ER -

Kang JS, Kim JH, Park KC. Fabrication of highly stable electron beams with CNT cold cathode. In Langer C, Lawrowski R, editors, 2017 30th International Vacuum Nanoelectronics Conference, IVNC 2017. Institute of Electrical and Electronics Engineers Inc. 2017. p. 124-125. 8051573. (2017 30th International Vacuum Nanoelectronics Conference, IVNC 2017). doi: 10.1109/IVNC.2017.8051573

Fabrication of highly stable electron beams with CNT cold cathode

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Keywords

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