Field emission of nitrogen doped DLC films deposited by PECVD

Kyu Chang Park; Jong Hyun Moon; Jae Gak Kim; Suk Jae Chung; Myung Hwan Oh; Jin Jang

Field emission of nitrogen doped DLC films deposited by PECVD

Kyu Chang Park, Jong Hyun Moon, Jae Gak Kim, Suk Jae Chung, Myung Hwan Oh, Jin Jang

Research output: Contribution to conference › Paper › peer-review

5 Citations (Scopus)

Abstract

The N doping effect on the electrical conductivity and electron emission property for diamond like carbon (DLC) films deposited by PECVD has been studied. The electrical conductivity can be widely varied by n-type doping of the DLC. The relationship between the prefactor of conductivity and the conductivity activation energy satisfy the Meyer-Neldel relation: σ_o = σ_ooexp(AE_a) with A = 19 eV^-1 and σ_oo = 9×10^-8 S/cm. The emission currents for heavily N doped DLC films are much higher than undoped DLC even though lightly N doped films show much smaller currents.

Original language	English
Pages	263-267
Number of pages	5
Publication status	Published - 1996
Event	Proceedings of the 1996 9th International Vacuum Microelectronics Conference, IVMC - St.Petersburg, Russia Duration: 7 Jul 1996 → 12 Jul 1996

Conference

Conference	Proceedings of the 1996 9th International Vacuum Microelectronics Conference, IVMC
City	St.Petersburg, Russia
Period	7/07/96 → 12/07/96

Cite this

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title = "Field emission of nitrogen doped DLC films deposited by PECVD",

abstract = "The N doping effect on the electrical conductivity and electron emission property for diamond like carbon (DLC) films deposited by PECVD has been studied. The electrical conductivity can be widely varied by n-type doping of the DLC. The relationship between the prefactor of conductivity and the conductivity activation energy satisfy the Meyer-Neldel relation: σo = σooexp(AEa) with A = 19 eV-1 and σoo = 9×10-8 S/cm. The emission currents for heavily N doped DLC films are much higher than undoped DLC even though lightly N doped films show much smaller currents.",

author = "Park, {Kyu Chang} and Moon, {Jong Hyun} and Kim, {Jae Gak} and Chung, {Suk Jae} and Oh, {Myung Hwan} and Jin Jang",

year = "1996",

language = "English",

pages = "263--267",

note = "Proceedings of the 1996 9th International Vacuum Microelectronics Conference, IVMC ; Conference date: 07-07-1996 Through 12-07-1996",

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TY - CONF

T1 - Field emission of nitrogen doped DLC films deposited by PECVD

AU - Park, Kyu Chang

AU - Moon, Jong Hyun

AU - Kim, Jae Gak

AU - Chung, Suk Jae

AU - Oh, Myung Hwan

AU - Jang, Jin

PY - 1996

Y1 - 1996

N2 - The N doping effect on the electrical conductivity and electron emission property for diamond like carbon (DLC) films deposited by PECVD has been studied. The electrical conductivity can be widely varied by n-type doping of the DLC. The relationship between the prefactor of conductivity and the conductivity activation energy satisfy the Meyer-Neldel relation: σo = σooexp(AEa) with A = 19 eV-1 and σoo = 9×10-8 S/cm. The emission currents for heavily N doped DLC films are much higher than undoped DLC even though lightly N doped films show much smaller currents.

AB - The N doping effect on the electrical conductivity and electron emission property for diamond like carbon (DLC) films deposited by PECVD has been studied. The electrical conductivity can be widely varied by n-type doping of the DLC. The relationship between the prefactor of conductivity and the conductivity activation energy satisfy the Meyer-Neldel relation: σo = σooexp(AEa) with A = 19 eV-1 and σoo = 9×10-8 S/cm. The emission currents for heavily N doped DLC films are much higher than undoped DLC even though lightly N doped films show much smaller currents.

UR - http://www.scopus.com/inward/record.url?scp=0030368553&partnerID=8YFLogxK

M3 - Paper

AN - SCOPUS:0030368553

SP - 263

EP - 267

T2 - Proceedings of the 1996 9th International Vacuum Microelectronics Conference, IVMC

Y2 - 7 July 1996 through 12 July 1996

ER -

Field emission of nitrogen doped DLC films deposited by PECVD

Abstract

Conference

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