Field emission properties of ta-C films with nitrogen doping

Kyu Chang Park; Jong Hyun Moon; Suk Jae Chung; Jae Hoon Jung; Byeong Kwon Ju; Myung Hwan Oh; W. I. Milne; Min Koo Han; Jin Jang

Field emission properties of ta-C films with nitrogen doping

Kyu Chang Park, Jong Hyun Moon, Suk Jae Chung, Jae Hoon Jung, Byeong Kwon Ju, Myung Hwan Oh, W. I. Milne, Min Koo Han, Jin Jang

Research output: Contribution to conference › Paper › peer-review

2 Citations (Scopus)

Abstract

We have studied the electron emission characteristics of tetrahedral amorphous carbon (ta-C) films with different nitrogen content. With increasing N content in ta-C, the room temperature conductivity as well as the emission current decreases and then increases, resulting in minima. The Fermi-level shifts toward the conduction band and thus the work function decreases by N doping in ta-C, however the emission currents of doped ta-C films are less than those of undoped ta-C.

Original language	English
Pages	298-302
Number of pages	5
Publication status	Published - 1996
Event	Proceedings of the 1996 9th International Vacuum Microelectronics Conference, IVMC - St.Petersburg, Russia Duration: 7 Jul 1996 → 12 Jul 1996

Conference

Conference	Proceedings of the 1996 9th International Vacuum Microelectronics Conference, IVMC
City	St.Petersburg, Russia
Period	7/07/96 → 12/07/96

Cite this

@conference{cd249396afa6497faa7602d9f08e5835,

title = "Field emission properties of ta-C films with nitrogen doping",

abstract = "We have studied the electron emission characteristics of tetrahedral amorphous carbon (ta-C) films with different nitrogen content. With increasing N content in ta-C, the room temperature conductivity as well as the emission current decreases and then increases, resulting in minima. The Fermi-level shifts toward the conduction band and thus the work function decreases by N doping in ta-C, however the emission currents of doped ta-C films are less than those of undoped ta-C.",

author = "Park, {Kyu Chang} and Moon, {Jong Hyun} and Chung, {Suk Jae} and Jung, {Jae Hoon} and Ju, {Byeong Kwon} and Oh, {Myung Hwan} and Milne, {W. I.} and Han, {Min Koo} and Jin Jang",

year = "1996",

language = "English",

pages = "298--302",

note = "Proceedings of the 1996 9th International Vacuum Microelectronics Conference, IVMC ; Conference date: 07-07-1996 Through 12-07-1996",

}

TY - CONF

T1 - Field emission properties of ta-C films with nitrogen doping

AU - Park, Kyu Chang

AU - Moon, Jong Hyun

AU - Chung, Suk Jae

AU - Jung, Jae Hoon

AU - Ju, Byeong Kwon

AU - Oh, Myung Hwan

AU - Milne, W. I.

AU - Han, Min Koo

AU - Jang, Jin

PY - 1996

Y1 - 1996

N2 - We have studied the electron emission characteristics of tetrahedral amorphous carbon (ta-C) films with different nitrogen content. With increasing N content in ta-C, the room temperature conductivity as well as the emission current decreases and then increases, resulting in minima. The Fermi-level shifts toward the conduction band and thus the work function decreases by N doping in ta-C, however the emission currents of doped ta-C films are less than those of undoped ta-C.

AB - We have studied the electron emission characteristics of tetrahedral amorphous carbon (ta-C) films with different nitrogen content. With increasing N content in ta-C, the room temperature conductivity as well as the emission current decreases and then increases, resulting in minima. The Fermi-level shifts toward the conduction band and thus the work function decreases by N doping in ta-C, however the emission currents of doped ta-C films are less than those of undoped ta-C.

UR - http://www.scopus.com/inward/record.url?scp=0030349721&partnerID=8YFLogxK

M3 - Paper

AN - SCOPUS:0030349721

SP - 298

EP - 302

T2 - Proceedings of the 1996 9th International Vacuum Microelectronics Conference, IVMC

Y2 - 7 July 1996 through 12 July 1996

ER -

Field emission properties of ta-C films with nitrogen doping

Abstract

Conference

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