Focusing Electrode on Focal Spot Size and Dose by Carbon Nanotube Based Cold Cathode Electron Beam (C-Beam)

Yi Yin Yu; Kyu Chang Park

doi:10.1109/IVNC57695.2023.10188986

Focusing Electrode on Focal Spot Size and Dose by Carbon Nanotube Based Cold Cathode Electron Beam (C-Beam)

Yi Yin Yu, Kyu Chang Park

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

2 Citations (Scopus)

Abstract

Electron beam focusing is crucial for various vacuum electron applications such as scanning electron microscope SEM), electron beam lithography (EBL), electron beam welding (EBW) and so on. We have demonstrated high quality X-ray imaging capable cold cathode electron beam design with focusing electrode. The focal spot size (FSS) and dose characteristics were improved by our focusing electrode integrated C-beam. By optimizing, as small as 0.1 mm of fss and 11.2 % of enhanced dose were confirmed. The authors believe that our sophisticated beam design will pave for next generation X-ray techniques.

Original language	English
Title of host publication	36th IEEE International Vacuum Nanoelectronics Conference, IVNC 2023
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	137-138
Number of pages	2
ISBN (Electronic)	9798350301434
DOIs	https://doi.org/10.1109/IVNC57695.2023.10188986
Publication status	Published - 2023
Event	36th IEEE International Vacuum Nanoelectronics Conference, IVNC 2023 - Cambridge, United States Duration: 10 Jul 2023 → 13 Jul 2023

Publication series

Name	36th IEEE International Vacuum Nanoelectronics Conference, IVNC 2023

Conference

Conference	36th IEEE International Vacuum Nanoelectronics Conference, IVNC 2023
Country/Territory	United States
City	Cambridge
Period	10/07/23 → 13/07/23

Bibliographical note

Publisher Copyright:
© 2023 IEEE.

Keywords

Beam focusing
C-beam
X-ray dose
focal spot size (FSS)
focusing electrode
high quality X-ray imaging

Access to Document

10.1109/IVNC57695.2023.10188986

Cite this

Yu, Y. Y., & Park, K. C. (2023). Focusing Electrode on Focal Spot Size and Dose by Carbon Nanotube Based Cold Cathode Electron Beam (C-Beam). In 36th IEEE International Vacuum Nanoelectronics Conference, IVNC 2023 (pp. 137-138). (36th IEEE International Vacuum Nanoelectronics Conference, IVNC 2023). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/IVNC57695.2023.10188986

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title = "Focusing Electrode on Focal Spot Size and Dose by Carbon Nanotube Based Cold Cathode Electron Beam (C-Beam)",

abstract = "Electron beam focusing is crucial for various vacuum electron applications such as scanning electron microscope SEM), electron beam lithography (EBL), electron beam welding (EBW) and so on. We have demonstrated high quality X-ray imaging capable cold cathode electron beam design with focusing electrode. The focal spot size (FSS) and dose characteristics were improved by our focusing electrode integrated C-beam. By optimizing, as small as 0.1 mm of fss and 11.2 % of enhanced dose were confirmed. The authors believe that our sophisticated beam design will pave for next generation X-ray techniques.",

keywords = "Beam focusing, C-beam, X-ray dose, focal spot size (FSS), focusing electrode, high quality X-ray imaging",

author = "Yu, {Yi Yin} and Park, {Kyu Chang}",

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year = "2023",

doi = "10.1109/IVNC57695.2023.10188986",

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series = "36th IEEE International Vacuum Nanoelectronics Conference, IVNC 2023",

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Yu, YY & Park, KC 2023, Focusing Electrode on Focal Spot Size and Dose by Carbon Nanotube Based Cold Cathode Electron Beam (C-Beam). in 36th IEEE International Vacuum Nanoelectronics Conference, IVNC 2023. 36th IEEE International Vacuum Nanoelectronics Conference, IVNC 2023, Institute of Electrical and Electronics Engineers Inc., pp. 137-138, 36th IEEE International Vacuum Nanoelectronics Conference, IVNC 2023, Cambridge, United States, 10/07/23. https://doi.org/10.1109/IVNC57695.2023.10188986

Focusing Electrode on Focal Spot Size and Dose by Carbon Nanotube Based Cold Cathode Electron Beam (C-Beam). / Yu, Yi Yin; Park, Kyu Chang.
36th IEEE International Vacuum Nanoelectronics Conference, IVNC 2023. Institute of Electrical and Electronics Engineers Inc., 2023. p. 137-138 (36th IEEE International Vacuum Nanoelectronics Conference, IVNC 2023).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

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AU - Park, Kyu Chang

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N2 - Electron beam focusing is crucial for various vacuum electron applications such as scanning electron microscope SEM), electron beam lithography (EBL), electron beam welding (EBW) and so on. We have demonstrated high quality X-ray imaging capable cold cathode electron beam design with focusing electrode. The focal spot size (FSS) and dose characteristics were improved by our focusing electrode integrated C-beam. By optimizing, as small as 0.1 mm of fss and 11.2 % of enhanced dose were confirmed. The authors believe that our sophisticated beam design will pave for next generation X-ray techniques.

AB - Electron beam focusing is crucial for various vacuum electron applications such as scanning electron microscope SEM), electron beam lithography (EBL), electron beam welding (EBW) and so on. We have demonstrated high quality X-ray imaging capable cold cathode electron beam design with focusing electrode. The focal spot size (FSS) and dose characteristics were improved by our focusing electrode integrated C-beam. By optimizing, as small as 0.1 mm of fss and 11.2 % of enhanced dose were confirmed. The authors believe that our sophisticated beam design will pave for next generation X-ray techniques.

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KW - C-beam

KW - X-ray dose

KW - focal spot size (FSS)

KW - focusing electrode

KW - high quality X-ray imaging

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M3 - Conference contribution

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T3 - 36th IEEE International Vacuum Nanoelectronics Conference, IVNC 2023

SP - 137

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BT - 36th IEEE International Vacuum Nanoelectronics Conference, IVNC 2023

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Yu YY, Park KC. Focusing Electrode on Focal Spot Size and Dose by Carbon Nanotube Based Cold Cathode Electron Beam (C-Beam). In 36th IEEE International Vacuum Nanoelectronics Conference, IVNC 2023. Institute of Electrical and Electronics Engineers Inc. 2023. p. 137-138. (36th IEEE International Vacuum Nanoelectronics Conference, IVNC 2023). doi: 10.1109/IVNC57695.2023.10188986

Focusing Electrode on Focal Spot Size and Dose by Carbon Nanotube Based Cold Cathode Electron Beam (C-Beam)

Abstract

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Bibliographical note

Keywords

Access to Document

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