Abstract
The crystallization of a-Si by blue laser annealing (BLA) is introduced for low-cost high resolution, thin-film transistor (TFT) backplanes for foldable and rollable AMOLED displays. A big advantage of BLA is to provide low temperature polycrystalline silicon (LTPS) with protrusion-free active channel. The BLA LTPS TFT manufactured on flexible substrate exhibits high field effect mobility of 169 cm2/Vs, a subthreshold voltage swing less than 201 mV/dec and excellent electrical stability and mechanical robustness.
| Original language | English |
|---|---|
| Pages (from-to) | 1-4 |
| Number of pages | 4 |
| Journal | Digest of Technical Papers - SID International Symposium |
| Volume | 52 |
| Issue number | 1 |
| DOIs | |
| Publication status | Published - 2021 |
| Event | 58th International Symposium on Digest of Technical Papers, ICDT 2021 - Virtual, Online Duration: 17 May 2021 → 21 May 2021 |
Bibliographical note
Publisher Copyright:© 2021 SID.
Keywords
- Blue laser annealing (BLA)
- Flexible
- Foldable
- Low Temperature Polycrystalline Silicon (LTPS)
- Thin-film transistor (TFT)