Gettering by cf4-ar plasma-treated titanium within anodically bonded glass-silicon microcavities

Surajit Kumar Hazra; Nam Kuk Kim; Jaehong Park; Byoungdoo Choi; Sangmin Lee; Tae Young Choi; Dong Il Dan Cho

Gettering by cf4-ar plasma-treated titanium within anodically bonded glass-silicon microcavities

Surajit Kumar Hazra
, Nam Kuk Kim
, Jaehong Park
, Byoungdoo Choi
, Sangmin Lee
, Tae Young Choi
, Dong Il Dan Cho

Research output: Contribution to journal › Article › peer-review

7 Citations (Scopus)

Abstract

The gettering of CF4-Ar plasma-treated titanium films has been studied by X-ray photoelectron spectroscopy, optical microscopy and field emission scanning electron microscopy. This study shows a convenient way to eliminate the native oxide impurities from the titanium surface before getter activation. A vacuum-packaged environment and the activation conditions for 2 mm × 1.8 mm × 2500 A titanium getter films were realized by a glass-silicon anodic bonding process at 400°C and a 40 min thermal treatment at 500°C, respectively. The surface characteristics of the titanium films were analyzed before and after packaging to determine the role of fluorine. The fluorine coverage on the titanium surface as a result of plasma treatment reveals a new gettering mechanism with high oxygen-capturing potential.

Original language	English
Pages (from-to)	37-51
Number of pages	15
Journal	Sensors and Materials
Volume	21
Issue number	1
Publication status	Published - 2009

Bibliographical note

Funding Information:
This paper was supported in part by the United States Agency for International Development (USAID), West Africa Natural Resource Management InterCRSP Grant No. CR-4844-425292 and the National Aeronautics and Space Administration (NASA) Grant No NAG5-10721. The authors greatly acknowledge the support of the Baker Lab of the Agronomy Department, Iowa State University, Ames, IA 50011 and Ms. Bridget Sanghadasa of the Center for Hydrology, Soil Climatology, and Remote Sensing (HSCaRS), Department of Plant & Soil Science, and the Agricultural Experiment Station, Alabama A&M University, Normal, AL 35762. Any use of trade, product, or firm names is for descriptive purposes only and does not imply endorsement by the U.S. Government.

Keywords

XPS
anodic bonding
fluorine
getter
plasma
titanium

Cite this

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title = "Gettering by cf4-ar plasma-treated titanium within anodically bonded glass-silicon microcavities",

abstract = "The gettering of CF4-Ar plasma-treated titanium films has been studied by X-ray photoelectron spectroscopy, optical microscopy and field emission scanning electron microscopy. This study shows a convenient way to eliminate the native oxide impurities from the titanium surface before getter activation. A vacuum-packaged environment and the activation conditions for 2 mm × 1.8 mm × 2500 A titanium getter films were realized by a glass-silicon anodic bonding process at 400°C and a 40 min thermal treatment at 500°C, respectively. The surface characteristics of the titanium films were analyzed before and after packaging to determine the role of fluorine. The fluorine coverage on the titanium surface as a result of plasma treatment reveals a new gettering mechanism with high oxygen-capturing potential.",

keywords = "XPS, anodic bonding, fluorine, getter, plasma, titanium",

author = "Hazra, \{Surajit Kumar\} and Kim, \{Nam Kuk\} and Jaehong Park and Byoungdoo Choi and Sangmin Lee and Choi, \{Tae Young\} and Cho, \{Dong Il Dan\}",

note = "Funding Information: This paper was supported in part by the United States Agency for International Development (USAID), West Africa Natural Resource Management InterCRSP Grant No. CR-4844-425292 and the National Aeronautics and Space Administration (NASA) Grant No NAG5-10721. The authors greatly acknowledge the support of the Baker Lab of the Agronomy Department, Iowa State University, Ames, IA 50011 and Ms. Bridget Sanghadasa of the Center for Hydrology, Soil Climatology, and Remote Sensing (HSCaRS), Department of Plant \& Soil Science, and the Agricultural Experiment Station, Alabama A\&M University, Normal, AL 35762. Any use of trade, product, or firm names is for descriptive purposes only and does not imply endorsement by the U.S. Government.",

year = "2009",

language = "English",

volume = "21",

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journal = "Sensors and Materials",

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publisher = "M Y U Scientific Publishing Division",

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AU - Hazra, Surajit Kumar

AU - Kim, Nam Kuk

AU - Park, Jaehong

AU - Choi, Byoungdoo

AU - Lee, Sangmin

AU - Choi, Tae Young

AU - Cho, Dong Il Dan

N1 - Funding Information: This paper was supported in part by the United States Agency for International Development (USAID), West Africa Natural Resource Management InterCRSP Grant No. CR-4844-425292 and the National Aeronautics and Space Administration (NASA) Grant No NAG5-10721. The authors greatly acknowledge the support of the Baker Lab of the Agronomy Department, Iowa State University, Ames, IA 50011 and Ms. Bridget Sanghadasa of the Center for Hydrology, Soil Climatology, and Remote Sensing (HSCaRS), Department of Plant & Soil Science, and the Agricultural Experiment Station, Alabama A&M University, Normal, AL 35762. Any use of trade, product, or firm names is for descriptive purposes only and does not imply endorsement by the U.S. Government.

PY - 2009

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N2 - The gettering of CF4-Ar plasma-treated titanium films has been studied by X-ray photoelectron spectroscopy, optical microscopy and field emission scanning electron microscopy. This study shows a convenient way to eliminate the native oxide impurities from the titanium surface before getter activation. A vacuum-packaged environment and the activation conditions for 2 mm × 1.8 mm × 2500 A titanium getter films were realized by a glass-silicon anodic bonding process at 400°C and a 40 min thermal treatment at 500°C, respectively. The surface characteristics of the titanium films were analyzed before and after packaging to determine the role of fluorine. The fluorine coverage on the titanium surface as a result of plasma treatment reveals a new gettering mechanism with high oxygen-capturing potential.

AB - The gettering of CF4-Ar plasma-treated titanium films has been studied by X-ray photoelectron spectroscopy, optical microscopy and field emission scanning electron microscopy. This study shows a convenient way to eliminate the native oxide impurities from the titanium surface before getter activation. A vacuum-packaged environment and the activation conditions for 2 mm × 1.8 mm × 2500 A titanium getter films were realized by a glass-silicon anodic bonding process at 400°C and a 40 min thermal treatment at 500°C, respectively. The surface characteristics of the titanium films were analyzed before and after packaging to determine the role of fluorine. The fluorine coverage on the titanium surface as a result of plasma treatment reveals a new gettering mechanism with high oxygen-capturing potential.

KW - XPS

KW - anodic bonding

KW - fluorine

KW - getter

KW - plasma

KW - titanium

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M3 - Article

AN - SCOPUS:66349089606

SN - 0914-4935

VL - 21

SP - 37

EP - 51

JO - Sensors and Materials

JF - Sensors and Materials

IS - 1

ER -

Gettering by cf4-ar plasma-treated titanium within anodically bonded glass-silicon microcavities

Abstract

Bibliographical note

Keywords

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