High brightness vertically aligned carbon nanotube (CNT) cold cathode for electron microscope

Ha Rim Lee, Boklae Cho, Kyu Chang Park

Research output: Contribution to journalConference articlepeer-review

Abstract

We developed a high-brightness carbon nanotube (CNT) cold cathode and its studied structural analysis and electron emission characteristics. Based on structural properties, there is a difference in electron emission characteristics, which in turn affects the brightness of the beam. The correlation between the CNT cold cathode structure and its brightness was established, and an optimized electron beam module was designed for secondary electron microscopic imaging.

Original languageEnglish
Pages (from-to)823-825
Number of pages3
JournalProceedings of the International Display Workshops
Volume27
Publication statusPublished - 9 Dec 2021
Event27th International Display Workshops, IDW 2020 - Virtual, Online
Duration: 9 Dec 202011 Dec 2020

Bibliographical note

Publisher Copyright:
© 2020 ITE and SID.

Keywords

  • Carbon nanotube (CNT)
  • Cold cathode
  • High brightness

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