High-density silicon microprobe arrays for LCD pixel inspection

Engineering

• Flat Panel 100%
• Electrical Contact 100%
• Fabrication Method 50%
• Anisotropic 50%
• Cantilever Beam 50%
• Electrical Signal 50%
• Contact Force 50%
• Applied Load 50%
• Micro Machining 50%
• Design Constraint 50%
• Microfabrication 50%
• Surface Micro-Machining 50%
• Etch Rate 50%
• Probe Tip 50%
• Silicon Wafer 50%
• Breakage 50%
• Strength Requirement 50%