Abstract
We developed high performance cold cathode electron beam fabrication technique with carbon nanotube(CNT) emitters. Properties of CNT emitters and its electron emission characteristics should be compatible with application devices. Xray tubes require very high current with small cathode area and ultraviolet lamps require uniform electron emission on large area. So, we developed novel CNT electron beam with buffer and metal layer for sacrificing for structural rigidity and enhanced conductivity. We applied the novel CNT cold cathode electron beam for UV lamps and X-ray tubes for high performance UV light and X-ray image.
Original language | English |
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Title of host publication | 2018 31st International Vacuum Nanoelectronics Conference, IVNC 2018 |
Publisher | Institute of Electrical and Electronics Engineers Inc. |
ISBN (Electronic) | 9781538657171 |
DOIs | |
Publication status | Published - 1 Nov 2018 |
Event | 31st International Vacuum Nanoelectronics Conference, IVNC 2018 - Kyoto, Japan Duration: 9 Jul 2018 → 13 Jul 2018 |
Publication series
Name | 2018 31st International Vacuum Nanoelectronics Conference, IVNC 2018 |
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Conference
Conference | 31st International Vacuum Nanoelectronics Conference, IVNC 2018 |
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Country/Territory | Japan |
City | Kyoto |
Period | 9/07/18 → 13/07/18 |
Bibliographical note
Publisher Copyright:© 2018 IEEE.
Keywords
- UV-C light
- X-ray
- carbon nanotube
- electron beam