Abstract
We fabricated field emission electron sources and applied for the glass sealed x-ray tube for medical imaging devices. The x-ray tube consists of an electron beam with a patterned grown CNT emitters with RAP process. Those electron beam shows higher electron emission current and transmittance after glass seal. With the x-ray tube, we success to measure medical image with finger and high resolution PCBs. The fabricated x-ray tube shows electron transmission ratio (>90%) and current (>3 mA).
Original language | English |
---|---|
Title of host publication | 2017 30th International Vacuum Nanoelectronics Conference, IVNC 2017 |
Editors | Christoph Langer, Robert Lawrowski |
Publisher | Institute of Electrical and Electronics Engineers Inc. |
Pages | 68-69 |
Number of pages | 2 |
ISBN (Electronic) | 9781509039753 |
DOIs | |
Publication status | Published - 26 Sept 2017 |
Event | 30th International Vacuum Nanoelectronics Conference, IVNC 2017 - Regensburg, Germany Duration: 10 Jul 2017 → 14 Jul 2017 |
Publication series
Name | 2017 30th International Vacuum Nanoelectronics Conference, IVNC 2017 |
---|
Conference
Conference | 30th International Vacuum Nanoelectronics Conference, IVNC 2017 |
---|---|
Country/Territory | Germany |
City | Regensburg |
Period | 10/07/17 → 14/07/17 |
Bibliographical note
Publisher Copyright:© 2017 IEEE.
Keywords
- CNT
- High resolution x-ray image
- X-ray tube