Impact of Al₂O₃ spacers on the improvement in short-channel effects for the mesa-shaped vertical-channel In-Ga-Zn-O thin-film transistors with a channel length below 100 nm

To achieve a channel length scaling and an improvement in short-channel effect (SCE) for the mesa-shaped vertical thin-film transistors (VTFTs) using In-Ga-Zn-O (IGZO) channels prepared by atomic layer deposition (ALD), the impacts of two strategic approaches were investigated: the introduction of an ALD Al₂O₃ spacer and the modulation of ALD oxidants. The Al₂O₃ spacers were patterned with sound profiles by means of a hybrid-etching technique combining a wet- and plasma dry-etching processes to form vertical sidewalls corresponding to a channel length. For the cases when the Al₂O₃ spacers were prepared with H₂O oxidant, the IGZO VTFT with an In/Ga ratio of 1.7 showed the degradations in device characteristics including a turn-on voltage (V_ON) of −8.0 V and a subthreshold swing (SS) of 1.50 V/dec. When the In/Ga ratio was increased to 2.9, the device failed to be operated with conductive properties. The excess hydrogen contained within the Al₂O₃ spacer was suggested to be thermally diffused into the IGZO from the back-channel interface, leading to marked increase in the number of conduction carriers within the channel. To suppress the doping effect of hydrogen from the spacer, the ALD oxidant was strategically modulated to O₃. As results, the V_ON and SS of the IGZO VTFT were markedly improved to be −2.0 V and 0.483 V/dec, respectively. Additionally, the drain induced barrier lowering coefficient was also significantly enhanced from 2.9 to 0.13 V/V, demonstrating the excellent immunity against the SCE for the IGZO VTFTs with nanoscale channel lengths. It was concluded from these findings that the spacer engineering can be one of the most important guides for the implementation of IGZO VTFTs with channel lengths below 100 nm.