Abstract
Ferroelectric poly(vinylidene fluoride-trifluoroethylene) [P(VDF-TrFE)] and poly(methyl metacrylate) (PMMA)-blended P(VDF-TrFE) thin films are deposited by spin coating on Pt/TiO2/SiO2/Si, and their fatigue endurance is investigated by forming metal-ferroelectrics-metla (MFM) capacitors. It has been found that fatigue endurance is significantly improved by blending PMMA into P(VDF-TrFE). Under the tested conditions, the best endurance for alternating voltage pulses is obtained in the 4wt% PMMA blended P(VDF-TrFE) film.
| Original language | English |
|---|---|
| Journal | Japanese Journal of Applied Physics |
| Volume | 49 |
| Issue number | 3 PART 1 |
| DOIs | |
| Publication status | Published - 2010 |
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