Abstract
We investigated the effect of rapid thermal annealing (RTA) on the photoluminescence (PL) and electroluminescence of the In0.53Ga0.47As/In0.53 (Ga0.6 Al0.4)0.47 As multiple quantum well (MQW) laser structure with InGaAlAs barrier layers provided by the digital-alloy technique. The SiO2-(Si3N4-) capped samples followed by the RTA exhibited a significant improvement of PL intensity without any appreciable shifts in PL peak energy for settings of up to 750 °C (800 °C) for 45 s. This improvement is attributed to the annealing of nonradiative defects in InAlAs layers of digital-alloy InGaAlAs and partially those near the heterointerfaces of the digital-alloy layers. The InGaAs/InGaAlAs MQW laser diodes fabricated on the samples annealed at 850 °C show a hugely improved lasing performance.
| Original language | English |
|---|---|
| Pages (from-to) | 979-982 |
| Number of pages | 4 |
| Journal | Applied Physics A: Materials Science and Processing |
| Volume | 76 |
| Issue number | 6 |
| DOIs | |
| Publication status | Published - Apr 2003 |
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