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Improvement of photoluminescence and electroluminescence characteristics of MBE-grown In0.53Ga0.47As/In0.53(Ga0.6Al0. 4)0.47As quantum well laser structure with InGaAlAs digital alloys by thermal annealing

  • J. S. Yu
  • , J. D. Song
  • , J. M. Kim
  • , S. J. Bae
  • , Y. T. Lee
  • , H. Lim

Research output: Contribution to journalArticlepeer-review

2 Citations (Scopus)

Abstract

We investigated the effect of rapid thermal annealing (RTA) on the photoluminescence (PL) and electroluminescence of the In0.53Ga0.47As/In0.53 (Ga0.6 Al0.4)0.47 As multiple quantum well (MQW) laser structure with InGaAlAs barrier layers provided by the digital-alloy technique. The SiO2-(Si3N4-) capped samples followed by the RTA exhibited a significant improvement of PL intensity without any appreciable shifts in PL peak energy for settings of up to 750 °C (800 °C) for 45 s. This improvement is attributed to the annealing of nonradiative defects in InAlAs layers of digital-alloy InGaAlAs and partially those near the heterointerfaces of the digital-alloy layers. The InGaAs/InGaAlAs MQW laser diodes fabricated on the samples annealed at 850 °C show a hugely improved lasing performance.

Original languageEnglish
Pages (from-to)979-982
Number of pages4
JournalApplied Physics A: Materials Science and Processing
Volume76
Issue number6
DOIs
Publication statusPublished - Apr 2003

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